真空
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
24 巻, 6 号
選択された号の論文の6件中1~6を表示しています
  • 久呉 高博
    1981 年24 巻6 号 p. 341-345
    発行日: 1981/06/20
    公開日: 2009/09/29
    ジャーナル フリー
  • 坂本 雄一, 石部 行雄, 矢野 勝喜, 岡崎 清比古, 大山 等, 田中 裕二, 藤沢 登, 松崎 誼, 鈴木 紀男, 前野 勝樹, 山本 ...
    1981 年24 巻6 号 p. 346-352
    発行日: 1981/06/20
    公開日: 2009/09/29
    ジャーナル フリー
    Adischarge cleaning experiment was carried out in JFT-2 Tokamak by using a low electron temperature plasma of hydrogen produced by electron cyclotron resonance (ECR) discharge. By the use of 2.45 GHz, 2 kW cw microwave. The electron temperature and density of the plasma were typically 4 eV and 1.2 x 1010 cm-3 respectively. Under quasi-equilibrium condition, comparison between the ECR discharge cleaning and the Taylor discharge cleaning (TDC) was done by observing the partial pressures of CH4, H2O and CO gases. The TDC was carried out with a plasma with electron temperature of 4.1 eV and density of 3.5 x 1012 cm-3, produced with a pulse width of 10 ms and a repetition frequency of 0.67 Hz. Both cleaning methods were found to have the approximately equal cleaning effect. This shows the applicability of the ECR-DC to advanced Tokamaks.
  • 渡辺 文夫
    1981 年24 巻6 号 p. 353-359
    発行日: 1981/06/20
    公開日: 2009/09/29
    ジャーナル フリー
    The design and performance of a new type of ionization gauge, specifically developed for an accelerator, equipped with an ionsource constructed in combination of three electrodes (a hemisphere mesh anode, an annular filament and a funnel-shaped electron reflector) is described. In order to improve the signal-to-noise ratio, the ion current is converted into an alternating current signal by a modulator grid located beneath the ion outlet of the ion source. The new gauge has a sensitivity factor for nitrogen of 14 Torr-1 and a modulation factor of 1.00.
  • 石井 芳一, 服部 誠示, 太田 聡
    1981 年24 巻6 号 p. 360-369
    発行日: 1981/06/20
    公開日: 2009/09/29
    ジャーナル フリー
    R. F. reactive sputtering of iron in mixed argon-oxygen atmospheres has been investigated by means of measurements of deposition rate, electrical resistivity, and X-ray and electron diffraction. Thin films of iron oxides were deposited on glass, alumite, and (001) NaCl substrate, while changing the oxygen partial pressure from 2 × 10-4 to 5 × 10-2 Torr at a total pressure of 1.5 × 10 -2 Torr.
    A hysteresis of the deposition rate was found in an increasing and decreasing cycle of the oxygen partial pressure. This phenomenon was explained by a model based on the relative relation between the sputtering rate and the oxidation rate of an iron target surface. Hence, two stationary reactive sputtering states were found to exist between certain critical values p* and p**, where the depositon rate changed drastically. One was a high deposition rate, the other was a low one, associated with a clean iron target and an'oxidized one, respectively. In the former state, Fe3O4 single phase films were obtained by controlling the deposition rate. Properties such as lattice constant, microstructure, and orientation of the deposited Fe3O4 films formed at various oxidation degrees were also examined.
  • 横尾 邦義, 小野 昭一
    1981 年24 巻6 号 p. 370-376
    発行日: 1981/06/20
    公開日: 2009/09/29
    ジャーナル フリー
    A new type of high-speed ion pump using a multipactor cathode is proposed and the results, obtained in our experiments of the pump which was manufactured by way of the first trial, are described. The multipactor cathode has excellent characteristics for such a use, as follows; 1) it does not contaminate vacuum condition, because it is a cold cathode made of some pure metal, as like as Al. 2) electron emission density is considerably high. 3) ionization rate of supplied electrons can be increased largely compared with any other electron supply method. 4) supply of electrons into a considerably wide area is quite easy.
    We could confirm an advantageous characteristic of the pump, that is, the maximum pump current per unit volume reached up to 30 times as much as that of a usual ion pump in vacuum conditions of less than 10 -4 Pa.
  • 1981 年24 巻6 号 p. 397
    発行日: 1981年
    公開日: 2009/09/29
    ジャーナル フリー
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