The design and performance of a new Electron Microprobe Auger Spectrometer (EMAS) with the capability of UHV scanning electron microscope (SEM) is described.
The incident electron beam from a W-hairpin cathode is focused by a magnetic lens system, and spatial resolution is below 0.5 μm for the Auger analysis mode and on the order of 100 Å in the SEM mode. The vacuum of the specimen chamber is kept at 10^-9 Torr order during Auger analysis.
Furthermore, an improvement of a spatial resolution is made to 700 Å by replacing W-hairpin cathode to a LaB₆ cathode and introducing a pulse counter and signal processor in place of a conventional lock-in amplifier. Several examples of application are presented demonstrating the performance.

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A cryostat available to prepare thin films onto the substrate cooled at liquid nitrogen temperature is devised. The cryostat consists of a copper substrate holder having a cavity to be filled with liquid nitrogen and a cylindrical column trap having five stage apertures. The substrate temperature can be set in the range between 100-573K by controlling either the flow rate of liquid nitrogen or the electric current of an inner heater. The thickness of deposited film is monitored by a quartz oscillator. Temperature dependence of resonance frequency of the crystal monitor is observed. Electron micrographs of 100 Å thick Ge and Cr films deposited at liquid nitrogen temperature show uniform amorphous structure.

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