真空
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
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48 巻, 12 号
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小特集「真空計測」
解説
研究
  • BA真空計を複合した四重極残留ガス分析計
    渡辺 文夫
    2005 年 48 巻 12 号 p. 625-630
    発行日: 2005年
    公開日: 2006/08/11
    DOIhttps://doi.org/10.3131/jvsj.48.625
    ジャーナル フリー
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    A new total pressure measurement method in a quadrupole mass analyzer is described. A needle collector inserted in the grid functions as an ion collector of a Bayard-Alpert gauge when the needle collector is biased at ground potential via an electrometer. The sensitivity factor is about 0.016 Pa-1 with 2 mA emission current. The ion current via the needle collector is linear between 10-9 Pa and 10-1 Pa. When the needle collector is biased at gird potential, the peak height of spectrum increased by a factor of 19. Thus, once the multiplied value of a secondary electron multiplier is confirmed for the total pressure values with the needle collector at around 10-8 Pa, we are able to measure the total pressure of 10-11 Pa with the new RGA as well as the partial pressure quantitatively.
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