巻号一覧
19 巻, 3 号
選択された号の論文の3件中1～3を表示しています
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吉田 虔太郎, 武川 公1976 年 19 巻 3 号 p. 73-81
発行日: 1976/03/20
公開日: 2009/09/04
ジャーナル フリーMn-Al films with different compositions ranging from 8 to 21 at. % Mn were prepared by simultaneous vacuum deposition and their crystallization occurring in the temperature rise and their crystal structures were investigated through transmission electron micrographs and the diffraction patterns. Shape of the crystals emerging in the films depends on their composition. MnAl6 crystals grow in complete circular form when the composition is exactly at that of MnAl6, i.e. 14 at. % Mn. As the composition increases from this ideal value, crystals grow in circular, blade-like and avalanche form respectively. Diffraction patterns of these crystals also show a dependence of disorder in MnAl6 crystal lattice on the film composition. Extra spots, diffuse streaks and deficiency of spots were observed and some of them are interpreted to be due to disorder of stacking of atomic planes parallel to (001) MnAl6 lattice. A model of the disordered atomic arrangement is proposed to account for the deficiency of the diffraction spots.抄録全体を表示PDF形式でダウンロード (13586K) -
細川 直吉1976 年 19 巻 3 号 p. 82-89
発行日: 1976/03/20
公開日: 2009/09/04
ジャーナル フリーIn spite of carefull regulation, the reproducibility of SiO2 deposition rate has been sometimes poor in an rf sputtering system. This paper describes systematic experiments on the relationship between the deposition rate and vacuum quality in some sputtering systems. Data of the deposition rate versus vacuum characteristic parameters such as ultimate prssure, argon flow rate during sputtering, leak rate of air or water vapour, and baking time of the sputtering chamber are given. In addition gas analysis made by quadrupole mass filter shows that the pressure of water vapour is commonly most responsible for the reproducibility of the deposition rate. Internal liquid nitrogen trap pumping selectively water has been proved to be effective to suppress the decrease of the deposition rate and to improve reproducibility.抄録全体を表示PDF形式でダウンロード (1690K) -
菅野 卓雄1976 年 19 巻 3 号 p. 90-96
発行日: 1976/03/20
公開日: 2009/09/04
ジャーナル フリーPDF形式でダウンロード (1462K)
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