Microstructure and corrosion resistance of Fe-Hf-N soft magnetic thin films developed for digital VTR and data streamer applications are studied. Fe-Hf-N films of which Bs values are more than 1.5 T, consist of microcrystalline grians. The crystalline grain sizes of Fe and Hf-N particles in a Fe-Hf-N film are determined to be 8 and 2 nm, respectively. These of Fe and TaC particles in Fe-Ta-C-Al alloy film are 10〜12 nm and 4〜5 nm, respectively. Control of Fe and Hf-N crystalline grain sizes are important to realize useful soft magnetic characteristics as well as high corrosion resistance. Unlike the case of the Fe-Ta-C soft magnetic thin film, where an addition element such as Al is added to enhance corrosion resistance, the Fe-Hf-N soft magetic thin film, where micrograin atoms are possibly dissolved in Fe crystalline grains, shows high corrosion resistance which is suitable for magnetic head applications. At the same time, N may be possibly dissolving into Fe crystal phase. As a result, A Fe-Hf-N soft magnetic thin film has a high corrosion resistance, without a additional element such as Al of Fe-Ta-C soft magnetic thin film.
View full abstract