In order to obtain a ceramic barrier to prevent diffusion at the fiber/matrix interface of metal/metal composites, ZrC
x coating on molybdenum plates was attempted by an activated reactive evaporation process in a Bunshah type ion plating apparatus. Layers of the Zr-C binary system were deposited on the molybdenum plates under a constant Zr vapor pressure (under a constant voltage and current at an electron beam melting) and various C
2H
2 pressures. The properties of these coatings were investigated, and the following results were obtained. (1) A series of compositions in the Zr-C binary phase diagram, from the α-Zr to γ-phase via the bi-component phase of (α-Zr+γ), were deposited when the C
2H
2 pressure increased from 0 to 11.3×10
−2 Pa under a constant E. B. current of 0.7 A. By ESCA analysis, it was confirmed that the coating with a composition of (γ+Graphite) was deposited on the molybdenum plates. The hardness of the coatings and the lattice parameters of the α-Zr and ZrC
x phases increased lineary with C
2H
2 pressure. (2) The lattice parameters of the as-deposited ZrC
x phase deposited under the C
2H
2 pressures higher than 6.8×10
−2 Pa were considerably larger than the value in the reference. Lattice parameters of the ZrC
x phases decreased after annealing. While the lattice parameters of the ZrC
x phase in some of the annealed coatings decreased to the reference value, that of the coating deposited under the highest C
2H
2 pressure (11.3×10
−2 Pa) remained to be larger than it. The lattice parameter of the α-Zr phase in the coating deposited without supply of acetylene was almost equal to the reference value, both in the as-deposited and the annealed conditions. (3) While fine cracks appeared in the Zr-rich ZrC
x coatings formed under low C
2H
2 pressure, they did not become so in the C-rich ZrC
x coatings formed under high C
2H
2 pressure or in the bi-component coating with α-Zr formed under very low C
2H
2 pressure. (4) Grain sizes of α-Zr and ZrC
x phases obtained from X-ray diffraction analysis showed a good relationship with C
2H
2 pressure.
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