The magnetic properties, the thermal stability, and the corrosion resistance of Fe-Ta-C thin films prepared in an atomsphere containing N
2 were studied. As the N
2 content in the sputtering gas is increased,
Bs and μ decrease, while
Hc and λs increase. A film prepared in Ar+N
2 (1.5 vol%) has Bs of about 1.4 T, and μ (at 1 MHz) higher than 2000. A film prepared in Ar+N
2 (2 vol%) has
Hc of 80 A/m, and λs of 1.4×10
−6. Fe-Ta-C thin films produced in an atomsphere containing N
2 have a high thermal reliability. After thermal treatment at 873 K, the soft magnetic properties of Fe-Ta-C thin film produced in the atomsphere containing N
2 did not change, while that of Fe-Ta-C thin film produced in pure Ar atomsphere changed, namely,
Hc increased and μ decreased.
The corrosion resistance was measured by change of
Bs. The value of
Bs of the Fe-Ta-C thin film prepared in an atomsphere containning N
2 did not change after being immersed in pure water for 3.96×10
5 s. Furthermore, this film has a high corrosion resistance in pure water with Ar bubbling for 1800 s. However,
Bs of Fe-Ta-C thin film prepared in pure Ar atomsphere decreased to 65% of the initial value. After immersing the Fe-Ta-C thin film prepared in Ar+N
2 (0.5 vol%) in 0.01 N NaClaq for 3.96×10
5 s,
Bs decreased to 75% of the initial value, while in the case of Fe-Ta-C thin film prepared in Ar+N
2 (5 vol%),
Bs decreased to 95% of the initial
Bs.
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