Experimential observation of SiO
2 precipitation reaction on a Si substrate through thermal decomposition of TEOS was pursued as functions of temperature, TEOS concentration and residence time where the gaseous reaction products identified by the atmospheric mass-spectrometer are C
2H
5 and C
2H
5OH, from which the following reaction scheme can be proposed:
(1) The overall thermal decomposition reaction of TEOS to precipitate SiO
2(s) can be expressed as follows:
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(2) The gaseous reaction intermediate species observed is SiO(OC
2H
5)
2, which may be produced by the following reaction:
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(3) The oder of reaction with respect to the TEOS concentration obtained experimentally is from 0.2 to 0.5.
(4) The above-mentioned experimental observation, in which the step(c) is the rate controlling step and the oder of reaction is (1/3), leads to
(a) the thermal decomposition of TEOS to produce the intermediate:
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(b) the adsorption reaction of the intermediate:
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(c) the SiO
2(s) precipitation from the adsorpted speciees:
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