Some properties of Gallium Antimonide films evaporated on the slide glass for substrate temperature range between 100°C to 400°C by the flashing method have been investigated experimentally. And the thickness of samples was about 6000Å, and the evaporation speed about 130Å/min.
X ray diffraction patterns of the samples showed the existence of Sb crystals up to 250°C300°C, Over 300°C the peaks for Sb crystals disappeared and the diffraction intensities of GaSb increased with substrate temperature. Between 350°C and 400°C the patterns corresponding to ones of bulk material was obtained.
And the transmittance of films deposited below 250°C was not observed in infrared region. But above 300°C the discontinuity of transmittance started to appear in the range of 800850 mμ and the transmittance reached constant at about 1800 mμ neglecting the interference term.
Electrical properties of the sample at 400°C showed that the impurity concentration and conductivity was 7. 73·10
18/cm
3and 120 Ω
-1 cm
-1 respectively at 300°K. Therefore the mobility was 114. 5 cm
2/volt·sec.
The sample annealed at 450°C for 2 hours in vacuum showed less Hall coefficient and less conductivity than not annealed film.
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