Superconducting thin films (Nb
3Ge, Nb
3Si and Nb) have been prepared in a chamber cooled with liquid N
2 at high rate by a magnetron sputtering method.
Following results were obtained.
(a) The chamber wall acts as a cryo-pump, trapping impurity gas during sputtering so that bell jar was completely separated from a pumping system to obtain environment free from oil. Nb films of three nine were obtained.
(b) Just after a deposition, thermal quenching down to 80 K was performed by a thermal conduction of sample holder which contact with liquid N
2 container. This method was tried for the first time. It was effective to depress an undersirous stable phase for preparing metastable Nb
3Ge and Nb
3Si. As a result, production of Nb
3Ge become easy and Nb
3Si was obtained with high TC nearly as high as by the explosion method.
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