Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
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Volume 7, Issue 8
Displaying 1-3 of 3 articles from this issue
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  • Thin Film Transistor
    Junkichi NAKAI
    1964 Volume 7 Issue 8 Pages 272-280
    Published: August 20, 1964
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.7.272
    JOURNAL FREE ACCESS
    Download PDF (1403K)
  • The Diaphragm Manometer
    Osamu TSUKAKOSHI, Masashi KIRIYA
    1964 Volume 7 Issue 8 Pages 281-290
    Published: August 20, 1964
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.7.281
    JOURNAL FREE ACCESS
    Download PDF (1301K)
  • Continuous Multi-Layer Evaporator
    Hideo SHIMURA, Takeshi HAYASHI, Seiichi MASHIKO
    1964 Volume 7 Issue 8 Pages 293-299
    Published: August 20, 1964
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.7.293
    JOURNAL FREE ACCESS
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    In case of depositing multi-Layer thin-film circuits, it is preferable to construct the whole circuit in one evacuation cycle. For this purpose, an evaporator has been designed with many special faculties, which conventional deposition aparatus is not equipped with. This article describes the construction and the evacuation data of this trial product. Principal functions are as follows :
    (1) 15 deposition masks are housed in the deposition chamber, and any given mask can be placed under the substrate.
    (2) Mutual positions between the substrate and the deposition mask are regulated with the accuracy of 10μ.
    (3) Faculties are provided for selecting one evaporation source out of 6, monitoring the depcsition rate in the range of 10500Å/sec, and measuring the film thickness in the range of 0.15μ.
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