Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Volume 22, Issue 10
Displaying 1-4 of 4 articles from this issue
  • Tadashi FUKATSU
    1979 Volume 22 Issue 10 Pages 329-340
    Published: October 20, 1979
    Released on J-STAGE: September 04, 2009
    JOURNAL FREE ACCESS
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  • Touichi HATANO, Yoichiro UEMURA, Kenji UCHIDA
    1979 Volume 22 Issue 10 Pages 341-345
    Published: October 20, 1979
    Released on J-STAGE: September 04, 2009
    JOURNAL FREE ACCESS
    The ions which were generated at the vicinity of the tin cathode by oxygen low pressure reactive sputtering were investigated.
    In the energy distributions of the ions generated by the sputtering process, the ion current decreased exponentially with increasing ion energy. On the other hand, the ions generated in the discharge space showed maximum at about 20 eV.
    Sn+ and SnO+ were found during reactive sputtering, but neither positive nor negative ion of SnO2 was detected. It is considered that for the formation of tin oxide film on the substrate, Sn+ and SnO+ species generated at the cathode collide with discharge gas for neutralization.
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  • Hiroyuki KAWANO
    1979 Volume 22 Issue 10 Pages 346-351
    Published: October 20, 1979
    Released on J-STAGE: January 22, 2010
    JOURNAL FREE ACCESS
    Production of thermal negative ion (X-) from a polyatomic molecule (ZX) incident upon a heated metal surface is investigated theoretically from the viewpoint of thermochemistry. Quantitative expressions of emitted ion current i- (X-) as a function of surface temperature (T) are derived for the two extreme cases as to the degree of dissociation (γ) of ZX on the surface.
    Namely, i- (X-) ≅ K1 exp [A (X) -φ] for γ ≅ 1.0K2T-1/4exp [A (X) -φ-D (ZX) /2/kT] for γ << 1.0
    Here A (X), φ and D (ZX) are the electron affinity of X, the work function of the surface and the dissociation energy of ZX, respectively, and K's are virtually independent of T under a usual experimental condition. For the intermediate value of γ, however, i- (X-) cannot be expressed in such a simple form. These results indicate that neither A (X) nor D (ZX) can be determined accurately by measuring temperature dependence of i- (X-) if the condition γ ≅ 1.0 or γ << 1.0 is not satisfied in the temperature range investigated.
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  • 1979 Volume 22 Issue 10 Pages 361
    Published: 1979
    Released on J-STAGE: January 22, 2010
    JOURNAL FREE ACCESS
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