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Volume 45, Issue 5
Displaying 1-15 of 15 articles from this issue
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Teiichi HOMMA2002 Volume 45 Issue 5 Pages 391-394
Published: May 20, 2002
Released on J-STAGE: October 20, 2009
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Minoru ISSHIKI, Kouji MIMURA, Shigeru SUZUKI2002 Volume 45 Issue 5 Pages 395-401
Published: May 20, 2002
Released on J-STAGE: October 20, 2009
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Daisuke FUJITA2002 Volume 45 Issue 5 Pages 402-408
Published: May 20, 2002
Released on J-STAGE: October 20, 2009
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Yoshiyuki MIZUNO, Teiichi HOMMA2002 Volume 45 Issue 5 Pages 409-414
Published: May 20, 2002
Released on J-STAGE: October 20, 2009
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Formation of Ultrahigh-Vacuum-Compatible Surfaces by Alcoholic-Lathing MethodMaki SUEMITSU2002 Volume 45 Issue 5 Pages 415-421
Published: May 20, 2002
Released on J-STAGE: October 20, 2009
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Yukio INOKUTI2002 Volume 45 Issue 5 Pages 422-427
Published: May 20, 2002
Released on J-STAGE: October 20, 2009
JOURNAL FREE ACCESSIn order to clarify the crack morpholoy in 180° bend-forming of Ti films deposited on (011) [100] single crystal of silicon steel and ferritic stainless steel sheets, Ti coating by the hollow cathode discharge (HCD) method was done on polished single crystal and stainless steel sheets, and then the Ti-coated samples were cutted to (A) rolling direction and (B) perpendicullar to the rolling direction, and 180° bend-formed, and observed by the scanning electron microscope.
(A) Ti-coated silicon steel of (011) [100] single crystal sample showed no distictive crack in Ti films on steel sheet, on which slip lines at intervals of 210 μm to the [1210] Ti direction could be observed in a rectangular-like morphology 1025 μm in width and 2080 μm in length.
Moreover, many fine slip lines at intervals of 50-200 nm to the [0001] Ti direction could be observed.
(B) Ti-coated silicon steel of (011) [100] single crystal sample also showed no distictive crack in Ti films on steel sheet, on which slip lines at intervals of 210 μm to the [0001]Ti direction could be observed in a rectangular-like morphology 1040 μm in width and 2070 μm in length.
Moreover, many fine slip lines at intervals of 200-500 nm to the [1210] Ti direction could be observed.
In contrast, Ti-coated stainless sheel sheet sample showed many highly-curved cracks of 1050 μm length in a slightly elongated state.
It should be noted that the crack morphology of Ti films of single crystal samples of silicon steel differed remarkably depending on (A) rolling direction and (B) perpendicullar to the rolling direction, and was caused by good coherency to only a axis of [1210] Ti and [100] Fe.View full abstractDownload PDF (1817K) -
Takashi MIURA, Ichiro ARAKAWA2002 Volume 45 Issue 5 Pages 428-432
Published: May 20, 2002
Released on J-STAGE: October 20, 2009
JOURNAL FREE ACCESSAn innovative technique to evaluate electric potential difference of triboelectricity between both dielectric surfaces was developed. Electric-discharge luminescence due to electrification during friction between a spherical diamond surface and a flat quartz one was observed using a microscope under various pressures of N2 gas. Two-dimensional spatial distribution of the luminescence around a contact shows a strong luminescence immediately after the friction and ring pattern of luminescence outside of friction area. The distribution of the strong luminescence along sliding direction, i.e., breakdown characteristics depending on gap distance, was well explained by a semi-empirical equation of discharge-current and gap distance. The potential difference between the both sides was also evaluated. Using the relation between a potential difference and a charge density in parallel-plate capacitor, surface charge density in the discharge area was calculated.View full abstractDownload PDF (898K) -
Hiroyuki YOSHIKI, Kazutake TANIGUCHI, Hiroki OGAWA, Yasuhiro HORIIKE2002 Volume 45 Issue 5 Pages 433-437
Published: May 20, 2002
Released on J-STAGE: October 20, 2009
JOURNAL FREE ACCESSCapacitively coupled micro-plasma (CCMP) was generated in a capillary on a quartz and a poly (ethyleneterephthalate) (PET) chip of 20 × 20 mm2 by excitation frequency of 13.5660 MHz at atmospheric pressure. The π-type matching circuit was miniaturized (150 × 100 × 40 mm3) and an inductance L was optimized to satisfy the resonance condition with excitation frequency, so that an atmospheric He discharge was attained at an incident power less than 5 W. He atomic excitation temperature Texc was estimated by the Boltzmann plot. It was found that Texc increases with increasing excitation frequency. The Si oxide thin films were prepared on inner wall of a poly (ethylene terephthalate) (PET) capillary with a cross section of φ500 μm and a length of 6 mm using the CCMP with gas flow rates of O2+ TEOS/He = 3.5/350 sccm under the condition of atmospheric pressure and room temperature. The X-ray photoelectron spectroscopy (XPS) mapping confirmed that Si oxide films were deposited on inner wall of a PET capillary.View full abstractDownload PDF (736K) -
Hiroshi SATO, Hiroyuki NAKAMURA, Sonoko TSUKAHARA, Yuuichi ISHIKAWA, S ...2002 Volume 45 Issue 5 Pages 438-442
Published: May 20, 2002
Released on J-STAGE: October 20, 2009
JOURNAL FREE ACCESSWe developed new methods for anodizing aluminum surfaces of plasma process chambers, one in sulfuric acid, and another in oxalic acid, in order to reduce particulate generation. The anodized films show a lower density of cracks than conventionally anodized films even after exposing to high temperature. Therefore, they have a better performance of small number in particulate. Analysis by X-ray diffraction, scanning electron microscopy, infrared spectroscopy and electron probe microanalysis reveals that both films are amorphous and that a cracking mechanism depends on the electrolyte and anodizing process. It is also found that number of cracks and total amount of outgassing increase after sealing process.View full abstractDownload PDF (1039K) -
Yoshio MIURA, Hideaki KASAI, Ayao OKIJI2002 Volume 45 Issue 5 Pages 443-447
Published: May 20, 2002
Released on J-STAGE: October 20, 2009
JOURNAL FREE ACCESSWe investigate and discuss the isotope effects on hydrogen abstraction from Cu (110) by performing quantum dynamics calculations that consider both direct (an impinging hydrogen atom directly abstracts an adsorbed hydrogen atom) and indirect (the impinging hydrogen atom diffuses across the surface before it abstracts an adsorbed hydrogen atom) processes quantum-mechanically. We show that the abstraction reaction probabilities Preac are 0.742 (D-on-D) > 0.640 (H-on-D) > 0.594 (H-on-H) > 0.533 (D-on-H), where X-on-Y indicates abstraction of Y atoms adsorbed on the surface by gas-phase X atoms. This implies that the abstraction reaction of a heavier atom adsorbed on a surface by a lighter atom easily occur as compared with abstraction reaction of a lighter atom adsorbed on a surface by a heavier atom.View full abstractDownload PDF (794K) -
Rifki MUHIDA, Wilson. A. DIÑO, Yoshio MIURA, Hideaki KASAI, Hir ...2002 Volume 45 Issue 5 Pages 448-452
Published: May 20, 2002
Released on J-STAGE: October 20, 2009
JOURNAL FREE ACCESSWe introduce a new method to enhance the orthohydrogen-parahydrogen (o-p H2) conversion yield /rate of a H2 interacting with a solid surface. This method consists of two steps. The first step involves the dynamical quantum filtering (DQF) process, and the second step relies on the steric effect on o-p H2 conversion. The purpose of the DQF process is to align the rotation of free rotating o-H2 such that we have only H2 in helicopter-like rotational states or H2 in cartwheel-like rotational states. In the second process, we bring these aligned o-H2 close to a catalyst surface (e.g., metal oxide surface). Based on the steric effect, o-H2 that has a cartwheel-like rotation will be converted to p-H2 with high rate.View full abstractDownload PDF (5684K) -
Michiko SASAKI, Isao NAKAMURA, Ichiro TAKANO, Yoshio SAWADA2002 Volume 45 Issue 5 Pages 453-457
Published: May 20, 2002
Released on J-STAGE: October 20, 2009
JOURNAL FREE ACCESSTribological properties of Ti-based (Ti, TiO2 and TiN) films on the stainless steel (304SS) substrate were investigated in the atmosphere of N2, O2 and air at several pressures. Films 0.2 μm thick were prepared on the mirror-polished substrate with an ion beam assisted deposition method, an ion beam assisted reactive deposition method and the dynamic ion mixing method. Tribological tests were carried out with a friction tester of Pin-On-Disk type in a high vacuum equipment. The wear surface was observed with an optical microscope, a scanning laser microscope and a scanning electron microscope.
The friction coefficients of stainless steel, Ti, TiO2 and TiN film increased with decreasing a pressure and those except of stainless steel converged on 0.3 in a pressure of 1 × 10-3 Pa. In an O2 atmosphere, the behavior of the Ti film in a friction coefficient for a pressure was similar to that of the TiO2 film, and in a N2 atmosphere, the friction coefficients of Ti and TiN film showed the same value. These results suggested the relation between a kind of a gas atmosphere in the tribological test and the film element.View full abstractDownload PDF (723K) -
Markus WILDE, Masuaki MATSUMOTO, Katsuyuki FUKUTANI, Tatsuo OKANO, Yos ...2002 Volume 45 Issue 5 Pages 458-462
Published: May 20, 2002
Released on J-STAGE: October 20, 2009
JOURNAL FREE ACCESSHydrogen interaction with the Ti (0001) single crystal surface was investigated with Nuclear Reaction Analysis (NRA) using 1H (15N, αγ) 12C. In contrast to thin polycrystalline Ti-films, molecular H2 adsorbs only with a small integral sticking coefficient on the single crystal surface even at 120 K and the H coverage saturates at 1.0 ML. Admission of atomic H at this temperature results in further hydrogen uptake, which saturates after absorption of an additional monolayer of H into subsurface sites. The H diffusion remains restricted up to240 K, causing accumulation of absorbed H in a shallow region of only7 nm depth beneath the surface under atomic H exposure conditions. With a maximum of10 at.% the H-concentration in this thin hydride overlayer remains far below the bulk solubility limit of TiH2. Only above240 K the observed H distributions along the concentration gradient into the bulk are in agreement with extrapolated diffusion data for α-Ti.View full abstractDownload PDF (591K) -
Yoshiyuki IGARI, Izumo ABE, Isao KUSUNOKI2002 Volume 45 Issue 5 Pages 463-467
Published: May 20, 2002
Released on J-STAGE: October 20, 2009
JOURNAL FREE ACCESSAluminum surfaces were nitrided with a 500 eV nitrogen ion beam at 25°C or with an ammonia molecular beam at 400°C. The nitrided surfaces were studied in situ under ultrahigh vacuum by X-ray photoelectron spectroscopy (XPS), ex situ by scanning electron microscopy (SEM), atomic force microscopy (AFM) and cathode luminescence (CL). The evolutions of the Al 2p and N 1s XP spectra during the nitridation show the difference of the reaction mechanism, though the XP spectra obtained at the saturation in the up-take curve of nitrogen were alike. The nitrogen atoms of the N+2 ion beam can penetrate into the bulk of aluminum and form the nitride even at room temperature, while the ammonia molecules are adsorbed on the surface and react with aluminum atoms supplied from the surface and the bulk. In the SEM and AFM images, an island-like structure was observed on the surface nitrided with the NH3 molecular beam. Moreover, a characteristic luminescence was observed from the sample nitrided with the molecular beam.View full abstractDownload PDF (788K) -
Yukio INOKUTI2002 Volume 45 Issue 5 Pages 468-472
Published: May 20, 2002
Released on J-STAGE: October 20, 2009
JOURNAL FREE ACCESSThe texture formation of TiN, TiCN and TiC films at the incipient stage during plasma coating on (011) [100] single crystals of silicon steel was investigated using the electron back scattering diffraction (EBSD) method.
The orientation of very thin TiN film parallel to the normal direction (ND) exhibited separate (111) and (100) colonies of about 20-30 μm areas with low angles, whereas that to the rolling direction (RD) also exhibited separate <111> and <110> colonies.
In contrast, the orientation of very thin TiCN and TiC films parallel to the ND and the RD was random.
It should be noted that the smaller misfits of ceramic films and single crystals of silicon steel makes colonies coherent to the ND or the RD orientation at the incipient stage during plasma coating.View full abstractDownload PDF (3005K)
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