It is pointed out that a lanthanium hexaboride LaB
6 cathode is the most useful to produce a discharge plasma source for ion plating, which can be operated continuously at high current density (≥40 A/cm
2) with long life times and can be exposed to air after use without deterioration. Next, how to use the LaB
6 conveniently is discussed with various experimental processes. Then, it is required that the LaB
6 cathode must be simple and strong mechanically, can start a gas discharge easily and can use stably in a magnetic field.
After we tried to remove a W filament which heats the LaB
6 initially and to improve demerits of the ordinary cylindrical type LaB
6 cathode, we developed a disc LaB
6 cathode with an assistant Ta pipe cathode which concentrates a pre-discharge (<10 A) into the cathode aperture and heats up the disc LaB
6 indirectly to prepare for starting a higher current (10A300 A) discharge. This LaB
6 cathode is very hopeful as an almighty cathode for ion plating.
It should be also emphasized that an effective power supply is developed for this disc LaB
6 cathode.
View full abstract