Pump-down curves of evaporators employing getter-ion pump are described.
One type of evaporatore (A) is equipped with a 125
l/s getter-ion pump but not a separation valve, and the other one (B) is equipped with a 400
l/s getter-ion pump and a separation valve of 150 mm in diameter. Although the bell-jar in the former apparatus is made of stainleas steel and the latter one is made of glass, Viton-A gaskets of L-type in section are used for sealing in both systems.
Pump-down curves are measured on these two types of evaporators under the following three conditions : (1) unbaked (2) baked out in vacuum atmosphere, and (3) baked out at atmospheric pressure. Without bake-out, the pressure of 1×10
-7 mmHg is attained even in about 7 hours-pumping, whereas baking-out all the system makes it possible to attain the pressure lower than 3×10
-9 mmHg. The separation valve which keeps getter-ion pump always in vacuum improves the pump-down curves evidently without baking.
Results are summarized as follows :
(1) In order to obtain ultra-high vacuum in the range of 10
-9 mmHg, baking out the whole system is indispensable.
(2) in order to obtain the pressure in the range of 10
-8 mmHg as fast as possible, the application of separation valve is required.
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