Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Volume 6, Issue 5
Displaying 1-4 of 4 articles from this issue
  • Yuzaburo FUJITA
    1963 Volume 6 Issue 5 Pages 169-176
    Published: May 20, 1963
    Released on J-STAGE: September 29, 2009
    JOURNAL FREE ACCESS
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  • Tadao NAKATANI, Masahiro UCHIYAMA
    1963 Volume 6 Issue 5 Pages 177-181
    Published: May 20, 1963
    Released on J-STAGE: September 29, 2009
    JOURNAL FREE ACCESS
    Pump-down curves of evaporators employing getter-ion pump are described.
    One type of evaporatore (A) is equipped with a 125 l/s getter-ion pump but not a separation valve, and the other one (B) is equipped with a 400l/s getter-ion pump and a separation valve of 150 mm in diameter. Although the bell-jar in the former apparatus is made of stainleas steel and the latter one is made of glass, Viton-A gaskets of L-type in section are used for sealing in both systems.
    Pump-down curves are measured on these two types of evaporators under the following three conditions : (1) unbaked (2) baked out in vacuum atmosphere, and (3) baked out at atmospheric pressure. Without bake-out, the pressure of 1×10-7 mmHg is attained even in about 7 hours-pumping, whereas baking-out all the system makes it possible to attain the pressure lower than 3×10-9 mmHg. The separation valve which keeps getter-ion pump always in vacuum improves the pump-down curves evidently without baking.
    Results are summarized as follows :
    (1) In order to obtain ultra-high vacuum in the range of 10-9 mmHg, baking out the whole system is indispensable.
    (2) in order to obtain the pressure in the range of 10-8 mmHg as fast as possible, the application of separation valve is required.
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  • Hisashi HORIKOSHI, Noriko TAMURA
    1963 Volume 6 Issue 5 Pages 182-188
    Published: May 20, 1963
    Released on J-STAGE: September 29, 2009
    JOURNAL FREE ACCESS
    Stress measurements in evaporated metallic films were carried out continuously during and after evaporation. Dependence of the stress upon film thickness, evaporation rate and substrate temperature were investigated. From these results, the origin of stress was discussed.
    For antimony films, it has been confirmed that the tensile stress is produced in the process of the crystallization of amorphous antimony. For metallic films such as Fe, Ni, Ag, Cu and Au films, it has been suggested that the recrystallization in films following after vacuum deposition plays an important role. The origin of the compressive stress, mainly observed in films evaporated onto heated substrates, however, has not been fully understood.
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  • Keiichi MATANO
    1963 Volume 6 Issue 5 Pages 189
    Published: May 20, 1963
    Released on J-STAGE: September 29, 2009
    JOURNAL FREE ACCESS
    Download PDF (158K)
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