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Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
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Volume 7, Issue 4
Displaying 1-3 of 3 articles from this issue
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  • Semi-Contineous Vacuum Coater and it's Products
    Ichiro UMEZU, Shigeji OTSUKA
    1964 Volume 7 Issue 4 Pages 120-128
    Published: April 20, 1964
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.7.120
    JOURNAL FREE ACCESS
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  • An Oil Absorbing, Trap for Ultra-high Vacuum Evaporator
    Seiichi MASHIKO, Tsutomu YAMANASHI
    1964 Volume 7 Issue 4 Pages 129-133
    Published: April 20, 1964
    Released on J-STAGE: January 28, 2010
    DOIhttps://doi.org/10.3131/jvsj.7.129
    JOURNAL FREE ACCESS
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    Pump-down curves of two evaporators equipped with large oil absorbing traps are described.
    One is a conventional commercial type which consists of a glass bell-jar (300φ × 350 h), a 120 l/sec oil diffusion-pump, a 2.5″ oil absorbing trap and 2.5″ main valve (bellows type). Since viton gaskets are used for all sealing faces, the absorbing trap, the main valve and its neighbar parts can be baked up to 450°C and 200°C respectively.
    The other is all metal evaporator bakable up to 400°C, which is consist of stainless steel bell-jar (300φ ×450h) two oil diffusion pumps of 700 l/sec and 60 l/sec in seiies, and 8″ absorbing trap. Gaskets are aluminium. The ultimate pressure of 4×10-7Torr can be attained by the former evaporator in about a half period comparing to the necessary time to reach the ultimate pressure of 7×10-6 Torr of an ordinary evaporator. By the latter one, an ultra-high vacuum in range of 10-9 Torr can be obtained.
    The absorbent used in this experiment is the activated Al203, which is baked at various degrees of temperature. The mass-spectrometric analysis of evolved gas from the absorbent shows that the baking is an effective method of activation, and by this the time need to attain ultimate pressure is to be shorten.
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  • Ultra High Vacuum System for Continuous Evaporation of Multilayer Thin Films
    Akio ITO, Hiroshi ISHII
    1964 Volume 7 Issue 4 Pages 134-144
    Published: April 20, 1964
    Released on J-STAGE: January 28, 2010
    DOIhttps://doi.org/10.3131/jvsj.7.134
    JOURNAL FREE ACCESS
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    The apparatus for continuous preparation of multi-layer thin films in ultra-high vacuum has been developed. The system was designed basing on a plan that pre-treated clean samples, being loaded in a side chamber without breaking the fine vacuum of a main chamber, would be able to transfer into the evaporation chamber. The main chamber, 600mm diameter x 1000mm length, has a demountable operating system wich provided with a tunnel oven-assembly, driving and masking mechanisms and others.
    Both side chambers, 600mm diameter x 600mm length, being attached to the main chamber have a demountable storage box equipped with heaters for pre-degassing substrates or heat-treating evaporated samples and handling mechanisms by which the substrate holders are drived in or taken out. The ultimate pressure of the main chamber is ensured to be in the 10-9 Torr region, while the pressure during evaporation process is 1 × 10-7 Torr. Four layer thin films can be prepared on 75mm × 75mm substrates continuously. Mass spectrometer data on the composition of the residual gases present during various steps of the pumping process and the outgassing characteristics of evaporation source (BeO crucible) are given.
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