Formation of wear resistance laminated HfC/TiC films on cemented carbide tools by low pressure chemical vapor deposition method were investigated.
As a result, HfC- (Hf·Ti) C-TiC triply layered films with good adhesion were fabricated by inserting (Hf·Ti) C film between HfC and TiC films, and formation condition of triply layerd films was clarified. Layer structure of TiC film was found to depend on carbon content in TiC.
The wear resistance characteristics of HfC- (Hf·Ti) C-TiC coated tools were found to be better than those of TiC coated tools. The mean flank wear, end flank wear, and crater wear of HfC- (Hf·Ti) C-TiC coated tools were smaller than those of TiC coated tools. However, the grooving wear of HfC- (Hf·Ti) C-TiC coated tools was almost same as that of TiC coated tools.
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