In order to investigate the influence of magnetic properties of TiN-coated silicon steel sheet, (1) hollow cathode dis-charge (HCD), (2) electron beam with radio frequency plasma (EB+RF), (3) electron beam with HCD (EB + HCD) and (4) diagonal-type high-current HCD (d-HCD) methods have been used inside a PVD apparatus.
The iron loss [W
17/50 (W/kg)] of the TiN-coated silicon steel sheets ionized and deposited with d-HCD were improved dramatically, as well as HCD. However, improvements of iron loss of those prepared with EB + RF and EB+HCD were 50% and 70%, respectively.
The deposition rate of d-HCD was 0.3 μm/min, which showed three times as large as that of HCD.
Iron loss improved with the increase of ionization of Ti for all methods, but as for d-HCD method reactive N
2 gas had large influence to iron loss.
Also, iron loss improved linearly with increasing intensity of (111) of TiN.
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