Shinku

A Sputtering System Designed for Fabrication of Josephson Junctions

Hiroshi OHTA

1979 Volume 22 Issue 11 Pages 367-372
Published: November 20, 1979
Released on J-STAGE: September 04, 2009

DOIhttps://doi.org/10.3131/jvsj.22.367

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Ultrahigh Vacuum System with Aluminum

Hajime ISHIMARU, Gen'ichi HORIKOSHI, Kazuyuki MINODA, Toshio IRISAWA

1979 Volume 22 Issue 11 Pages 373-388
Published: November 20, 1979
Released on J-STAGE: September 04, 2009

DOIhttps://doi.org/10.3131/jvsj.22.373

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A bakeable vacuum chamber (150 °C continuous) consists of aluminum alloy beam pipe (6063-T6) and bellows (5052-F) with an aluminum alloy flange (2219-T87) and a metal seal [Helicoflex-HN : pure aluminum (1050) O-ring with an elastic core (Ni base super alloy Inconel 750) which supplies the sealing force] has been constructed. The beam pipe and the flange (6063-T6/2219-T87), and the bellows and the flange (5052-F/2219-T87) were welded by an alternate current (50 Hz) TIG process using an aluminum alloy filler wire (4043). The mechanical properties of the aluminum alloy (2219-T87) is suitable for using the Helicoflex O-ring but the groove surface for the gasket is weak for scratching. Cromium-nitride coating by ion plating method was carried out on the aluminum surface of the gasket groove [thickness : 16 μm, micro Vickers hardness : 1800]. Ordinary stainless steel vacuum system can be replaced by the aluminum vacuum system in an accelerator.

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The Physical Meaning of a Pumping Down Curve, P (t)

Hajime MIZUNO, Katsuya NARUSHIMA, Gen'ichi HORIKOSHI, Osamu KONNO

1979 Volume 22 Issue 11 Pages 389-391
Published: November 20, 1979
Released on J-STAGE: September 04, 2009

DOIhttps://doi.org/10.3131/jvsj.22.389

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The evacuation of a vacuum system needs very long period of time. Under the condition of equilibrium between gas phase and adsorbed phase, the evacuation time “t” is determined mainly by adsorption-isotherm. The evacuation curve with butyl alcohol was measured at the pressure 10^-410^-6 Torr (1.33 × 10^-21.33 × 10^-4 Pa). In the pressure range from 10^-5 to 10^-6 Torr (1.33 × 10^-3?1.33 × 10^-4 Pa), Freundlich-type adsorption isotherm was derived from measured evacuation curve. This isotherm is about 10 times smaller compared to the isotherm measured by flash-filament method. This difference indicates wide spread of the adsorption energy of butyl alcohol on the surface.

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Pirani Type Vacuum Gauge with TaN Thin Films

Tadayoshi SHIOYAMA, Saichi OGAWA, Katsumi TAKIGUCHI, Tsutomu YOTSUYA, ...

1979 Volume 22 Issue 11 Pages 392-397
Published: November 20, 1979
Released on J-STAGE: September 04, 2009

DOIhttps://doi.org/10.3131/jvsj.22.392

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The pressure dependence of the vacuum gauge with TaN thin films was studied for pressure measurement over a wide range. These films have properties that make them suitable for use as sensors in resistive thermoconductive vacuum gauges : a large effective heat-conducting area and a large temperature cofficient of resistance. The vacuum gauge with these films was found to be sensitive to pressure changes in the range 7 × 10^-5 760 Torr in the case where the constant voltage was applied to the Wheatstone bridge with the thin film sensor.

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An Application of Cryopump for the Production of Ultra Fine Particles

Hitoshi ABE

1979 Volume 22 Issue 11 Pages 398-401
Published: November 20, 1979
Released on J-STAGE: September 04, 2009

DOIhttps://doi.org/10.3131/jvsj.22.398

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