Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
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Volume 5, Issue 9
Displaying 1-6 of 6 articles from this issue
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  • Stainless Steel for Vacuum Industry Use
    Tadatoshi OGURA
    1962 Volume 5 Issue 9 Pages 347-358
    Published: September 20, 1962
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.5.347
    JOURNAL FREE ACCESS
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  • A New Electron Beam Working Machine
    Kazumasa ONO
    1962 Volume 5 Issue 9 Pages 359-366
    Published: September 20, 1962
    Released on J-STAGE: January 28, 2010
    DOIhttps://doi.org/10.3131/jvsj.5.359
    JOURNAL FREE ACCESS
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    By the cooperation with the members of Hitachi Central Laboratory, we have recently succeeded in the manufacture of the Electron Beam Machining Equipment for the fine working of semi-conductors or metals etc. The instrument consists of an electron-optic system, working chamber and vacuum system, which operates under the working pressure of the order of 10-5 mmHg. This is able to heat and welt a specimen locally by the bombardment of finely focused electron beam. The groove cut with the electron beam is approximately 5μ in width.
    Performances :
    Accelerating voltage……020kV, 40kV, 60kV, 80kV, 100kV
    Beam current……1mA (max)
    Viewing system……An optical microscope with max. magnification 160X.
    Movable area of working table Inclination 45°, Rotation 360°, X-direction 20mm, Y-direction 20mm.
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  • Ultrahigh Vacuum System Composed of an Oil Diffusion Pump and a Sorption Pump
    Hikaru ARATA, Zenjiro ODA
    1962 Volume 5 Issue 9 Pages 367-370
    Published: September 20, 1962
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.5.367
    JOURNAL FREE ACCESS
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    An ultrahigh vacuum system which is composed of a Hickman type oil diffusion pump, a sorption pump and a non- refrigerated isolation trap using molecular sieve 13x as active material was tested. This combination has advantages of protecting the evacuation system from dangers by electricity failure. suspension of water-supply and of avoiding the trouble for a steady supply of refrigerant.
    The results obtained are summarized as follows.
    1) Amounts of air sorbed on molecular sieve 13x at 14°C and -183°C were about 2.5 l·μHg /g and 91446 l·μHg/g. respectively (at an apparent critical backing pressure=85μ) after bake -out at 400°C 26 for hours.
    2) Maintaining time of ultimate pressure depends on the activity of molecular sieve
    When a sorption pump with new molecular sieve was operated the system could be kept at an ultimate pressure below 5×10-9 mmHg for about 4 days. but with fairly used up one it was below 7×10-9mmHg for about 2 days.
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  • Erratum to : Experimental Study of Evaporated BaTiO3 Films
    1962 Volume 5 Issue 9 Pages 370
    Published: 1962
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.5.9_370
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  • [title in Japanese]
    [in Japanese]
    1962 Volume 5 Issue 9 Pages 371-374
    Published: September 20, 1962
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.5.371
    JOURNAL FREE ACCESS
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  • Erratum to : Evaporated films
    1962 Volume 5 Issue 9 Pages 383
    Published: 1962
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.5.9_383
    JOURNAL FREE ACCESS
    Download PDF (160K)
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