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Volume 19, Issue 1
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Susumu NAMBA, Mitsuo KAWABE1976 Volume 19 Issue 1 Pages 5-12
Published: January 20, 1976
Released on J-STAGE: September 04, 2009
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Hideo YOSHIDA, Hisatoshi FURUBAYASHI, Yoshinori INOUE, Toshiya TONOMUR ...1976 Volume 19 Issue 1 Pages 13-19
Published: January 20, 1976
Released on J-STAGE: September 04, 2009
JOURNAL FREE ACCESSA highly conductive, transparent film of In2O3 : Sn with good uniformity was deposited on a large glass substrate having an area of 60 × 90 cm. Deposition was carried out by passing the substrate over the source located off from the center line of movement. After the first deposition, the substrate was returned to the initial position and turned there by 180°. Then, the same process was repeated again. This design can be easily developed into a manufacturing process.
The uniformity variation of the coating thickness and that of the film resistance were as low as 10% and 25% respectively. In addition, the specific resistivity of 2.53.0 × 10 -4Ω· cm and the visible transmittance of about 90% were obtained all over the deposited area. It was confirmed that the relatively poor uniformity in resistivity was due to the dependence on the deposition rate.View full abstractDownload PDF (2530K) -
Toshiaki SUHARA, Hiroshi NISHIHARA, Jiro KOYAMA1976 Volume 19 Issue 1 Pages 20-22
Published: January 20, 1976
Released on J-STAGE: September 04, 2009
JOURNAL FREE ACCESSDownload PDF (2400K)
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