Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
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Volume 48, Issue 10
Displaying 1-5 of 5 articles from this issue
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Articles
  • Widening of the Measuring Pressure Range of the Inverted Cold Cathode Magnetron Vacuum Gauge
    Eiichi NISHIKAWA, Touru ARAI, Toshihide KIOKA, Kikuo YAMAGISHI
    2005 Volume 48 Issue 10 Pages 549-551
    Published: 2005
    Released on J-STAGE: August 11, 2006
    DOIhttps://doi.org/10.3131/jvsj.48.549
    JOURNAL FREE ACCESS
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    Wide range cold cathode inverted magnetron vacuum gauge is developed. A new idea, where higher voltage is applied to the gauge at lower pressure range and lower voltage is applied at higher pressure range, is introduced. It is found that operating pressure range is widened to 10Pa-1 × 10-6 Pa, discharge currents I and pressure P show good linearity in log I-log P plots at 1 × 10-6 Pa -1 Pa and in I-log P plots at 1 Pa-10 Pa. However, discharge currents larger than 1 mA are unstable at higher current range.
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  • Construction and Evaluation of Retractable Auger Electron Spectrometer with an Electron Gun Mounted on a Conflat Flange with an Outer Diameter of 70 mm
    Eiichi KOBAYASHI, Kazuhiko MASE, Akira NAMBU, Kenshi FUKUI
    2005 Volume 48 Issue 10 Pages 552-556
    Published: 2005
    Released on J-STAGE: August 11, 2006
    DOIhttps://doi.org/10.3131/jvsj.48.552
    JOURNAL FREE ACCESS
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    We have developed a retractable Auger electron spectrometer mounted on a conflat flange with an outer diameter of 70 mm. It consists of a commercial miniature electron gun, a miniature cylindrical mirror electron energy analyzer (CMA) with an outer diameter of 34 mm, a commercial 50 mm linear motion feedthrough, and a tilt adjustment mechanism. The CMA consists of a magnetic shield, inner and outer cylinders, a pinhole, and an electron multiplier. An electron gun is assembled in the CMA on axis. Electrons emitted with a polar angle of 26±2° are energy-analyzed and detected. The characteristics of this spectrometer are as follow. 1) It can be installed in a conflat flange port with an inner diameter of 35-38 mm. 2) The electron energy resolution is 0.9∼1.46% (ΔE/E, FWHM). 3) The distance between the sample and the front end of the spectrometer (work distance) is 12 mm. 4) Retractable using the linear motion feedthrough. 5) The tilt can be adjusted. 6) Maximum vacuum bake temperature is 230 °C (non operating). 7) Low cost due to the simple structure. 8) Troubleshooting is easy.
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  • Monte Calro Simulation of Transmission Probability of an Orifice by Considering Specular Reflection
    Masanori SHIRO, Hitoshi AKIMICHI, Masahiro HIRATA
    2005 Volume 48 Issue 10 Pages 557-561
    Published: 2005
    Released on J-STAGE: August 11, 2006
    DOIhttps://doi.org/10.3131/jvsj.48.557
    JOURNAL FREE ACCESS
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    Some parts of gas molecules reflect in specular direction after hitting a wall. In order to determine the conductance of an orifice accurately for vacuum standard and pumping speed measurement by orifice flow method, transmission probability of an orifice was calculated by Monte Calro simulation taking account of the specular reflection of gas molecules on its inner surface. If 10% of gas molecules are assumed to suffer specular reflection on the wall, the probability increases only 0.05% for the orifice of which thickness is 0.01 of its radius, while 0.5% for 0.1. The orifice should be thin, since it is not realistic to determine the amount of specular reflection. The thickness should be measured accurately to determine probability with high accuracy. The radius should be also measured to determine the rate of incidence of gas in the orifice with high accuracy.
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