Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
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Volume 11, Issue 6
Displaying 1-5 of 5 articles from this issue
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  • Silicon Oxide and Silicon Nitride
    Yasuo TARUI, Yoshio KOMIYA
    1968 Volume 11 Issue 6 Pages 193-198
    Published: June 20, 1968
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.11.193
    JOURNAL FREE ACCESS
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  • Effect of Forepressure Measurement with an Ionization Gauge in an Oil Diffusion Pump System
    Kazuo ISHIKAWA, Toshio NOZAWA
    1968 Volume 11 Issue 6 Pages 199-203
    Published: June 20, 1968
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.11.199
    JOURNAL FREE ACCESS
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    In an oil diffusion pump system having a booster and a main diffusion pump in series, readings of a BA gauge equipped at high vacuum have been observed to be increased by operating an ionization gauge placed between the two pumps. This effect appears even when the filament of the latter gauge is turned on without applying the grid voltage. The effect is largely increased with increasing forepressure of the main pump and with decreasing the heater input of this pump, and is also proportional to electron current of the BA gauge. The effect is not affected by cooling a trap, with liquid nitrogen, equipped between the main pump and the BA gauge, but diminishes by cooling a trap, with liquid nitrogen, equipped between the ionization gauge and a foreline. This effect can be explained neither by outgassing of the ionization gauge nor by escape of electrons or ions from the gauge. The most probable mechanism is that some of residual gases are decomposed on the hot filament surface and that hydrogen produced by the decomposition back-diffuses through the main pump.
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  • Welded Bellows
    Tomoki KAKEGAWA
    1968 Volume 11 Issue 6 Pages 204-212
    Published: June 20, 1968
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.11.204
    JOURNAL FREE ACCESS
    Download PDF (2240K)
  • [title in Japanese]
    [in Japanese]
    1968 Volume 11 Issue 6 Pages 213-220
    Published: June 20, 1968
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.11.213
    JOURNAL FREE ACCESS
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  • [title in Japanese]
    [in Japanese]
    1968 Volume 11 Issue 6 Pages 221-227
    Published: June 20, 1968
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.11.221
    JOURNAL FREE ACCESS
    Download PDF (1035K)
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