Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
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Volume 38, Issue 2
Displaying 1-3 of 3 articles from this issue
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  • Study of Metal-adsorbed Si Surfaces Using an Ultrahigh-vacuum Scanning Electron Microscope
    Akira ENDO, Shozo INO
    1995 Volume 38 Issue 2 Pages 59-65
    Published: February 20, 1995
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.38.59
    JOURNAL FREE ACCESS
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  • Crystallization Process of ZnO : Al Thin Films Prepared by RF Magnetron Sputtering
    Akio SUZUKI, Tatsuhiko MATSUSHITA, Masahiro OKUDA
    1995 Volume 38 Issue 2 Pages 66-73
    Published: February 20, 1995
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.38.66
    JOURNAL FREE ACCESS
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    ZnO : Al (AZO) films were deposited on glass substrates heated to 450°C by rf magnetron sputtering of a ZnO target containing 2 wt% Al2O3. Resistivity of 7.8×10-4 Ω·cm was obtained in 400-nm-thick AZO films prepared at a sputter argon gas pressure of 1 Pa. Total transmittance of 80% and haze ratio of 58% at a wavelength of 550 nm were obtained in 4000-nm-thick AZO films prepared at a sputter argon gas pressure of 3 Pa, with subsequent postannealing at 450°C for 20 min in N2 atmosphere. The crystallization process of AZO has been investigated by observation with ESEM (environmental scanning electron microscope).
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  • Influence of a Fringing Field on the Sensitivity of the Quadrupole Mass Spectrometer
    Seiji HIROKI, Kazuhiko KANEKO, Tetsuya ABE, Yoshio MURAKAMI
    1995 Volume 38 Issue 2 Pages 74-79
    Published: February 20, 1995
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.38.74
    JOURNAL FREE ACCESS
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    Fringing fields arising from both ends of a quadrupole electrode are recognized to affect the performance of the quadrupole mass spectrometer (QMS). The fringes were defined as two gaps between an ion source and the quadrupole (inlet), and between a detector case and the quadrupole (outlet). In this paper, the influence of inlet and outlet fringe lengths on the sensitivity of the QMS was experimentally studied using the movable ion source and the quadrupole, both of which were mounted on a three-dimensional manipulator. 4He+ (mass 4), 40Ar2+ (20), 40Ar+ (40), 132Xe2+ (66) and 132Xe+ (132) peaks were monitored. Except for 4He+, all species showed maximum peak intensities at nf of 0.7-1.0 cycles when the inlet fringe length was expressed in an rf cycle nf. However, all the peak intensities decreased consistently with increasing outlet fringe lengths. The experimental results of the sensitivity corresponded qualitatively with the calculated ones.
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