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Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
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Volume 33, Issue 5
Displaying 1-15 of 15 articles from this issue
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  • General Consideration on Gas Desorption Phenomena
    Gen'ichi HORIKOSHI
    1990 Volume 33 Issue 5 Pages 455-460
    Published: May 20, 1990
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.33.455
    JOURNAL FREE ACCESS
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  • My View on Outgassing Rate of Vacuum Materials
    Yoshio MURAKAMI
    1990 Volume 33 Issue 5 Pages 461-466
    Published: May 20, 1990
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.33.461
    JOURNAL FREE ACCESS
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  • Pumping down of Surface Gas
    Ken-ichi KANAZAWA
    1990 Volume 33 Issue 5 Pages 467-474
    Published: May 20, 1990
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.33.467
    JOURNAL FREE ACCESS
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  • Discussion on Methods for Measuring the Outgassing Rate
    Nagamitsu YOSHIMURA
    1990 Volume 33 Issue 5 Pages 475-481
    Published: May 20, 1990
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.33.475
    JOURNAL FREE ACCESS
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  • Direct Measurement of Outgas by Using a Uni-Directional Vacuum Gauge
    Masanori KOBAYASHI
    1990 Volume 33 Issue 5 Pages 482-487
    Published: May 20, 1990
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.33.482
    JOURNAL FREE ACCESS
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  • Characterization of Gas Desorption from Solid Samples with Small Size by TDS
    Yuko HIROHATA
    1990 Volume 33 Issue 5 Pages 488-495
    Published: May 20, 1990
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.33.488
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  • Studying of Technology for Outgassing Rate Measurement by the Throughput Method
    Nobuhiko OTA, Masashi SAITO, Hajime ISHIMARU
    1990 Volume 33 Issue 5 Pages 496-502
    Published: May 20, 1990
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.33.496
    JOURNAL FREE ACCESS
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    For the research of materials for use in a vacuum environment, the technology of outgassing measurement must be developed in order to obtain lower outgassing rates from the materials. We measured the outgassing rate of sample chambers and sample pieces using the throughput method. Then we studied the lowest limit on and problems involved in the measurement, and improved the measurement apparatus. The following results were obtained in this work : (1) The main factor leading to misunderstanding and determining the lowest limit was the outgassing from the Bayard-Alpert gauge. (2) In the outgassing rate measurment of the 11500 cm2 sample chamber, the order of 10-14 Torr·l/s·cm2 (at 20°C for nitrogen equivalent) was obtained using extractor gauges. (3) In the outgassing rate measurement of the 50 cm2 sample piece, the order of 10-12 Torr·l/s·cm2 (at 20°C for hydrogen equivalent) was obtained using a new quadrupole mass spectrometer for use in extremly-high vacuum. (4) It was possible to determine the outgassing rate of each gas component by measuring partial pressure.
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  • Effect of Pumping Speed on Outgassing Measurement with Throughput Method
    Kenji OKADA
    1990 Volume 33 Issue 5 Pages 503-506
    Published: May 20, 1990
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.33.503
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  • Effect of Atmospheric Oxidation on Reduction of Outgassing from Stainless Steel
    Yuichi ISHIKAWA, Yuko KOGUCHI, Kenji ODAKA
    1990 Volume 33 Issue 5 Pages 507-513
    Published: May 20, 1990
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.33.507
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    Vacuum-remelted-type 316L stainless steel is oxidized in air at 100°C and 250°C baked in vacuum. This oxidation and baking produce a surface in an extremely low outgassing state, as low as 4×10-11 Pam3/sm2. The temperature of baking following the atmospheric oxidation should be equal to or higher than the temperature of oxidation to produce a lower outgassing state compared to the corresponding fully degassed state without oxidation.
    The oxidation reduces C contaminants present on the surface and the quantity of desorbable CO, which may lead to the reduction of CO outgassing from the surface. Further, the surface oxide layer formed by the atmospheric oxidation is 57 nm thick and appears to effectively retard hydrogen diffusion from the bulk.
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  • Vacuum Property of Aluminum Alloy Chamber Treated with Electropolishing and Machining in Dry Atmosphere
    Tsutomu OHI, Youzi MUROO, Osamu KONNO
    1990 Volume 33 Issue 5 Pages 514-519
    Published: May 20, 1990
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.33.514
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    Two aluminum alloy chambers designed to hold the magnets and electrodes of a pulse beam stretcher were manufactured. The inner surface of one chamber was treated with electropolishing. The inner surface of the other chamber was treated with machining in a dry atmosphere.
    The electropolished chamber contained hydrate at the surface and showed a high outgassing rate of 1×10-9 Pa·m3/ (s·m2) after a 150°C, 24-hour bakeout. The chamber machined in the dry atmospher contained less hydrate at the surface than the electropolished chamber did and showed a low outgassing rate of 1.5×10-10 Pa·m3/ (s·m2) after a 150°C, 24-hour bakeout.
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  • Low Temperature Coating of Low Gas Adsorptive Boron Nitride using Surface Precipitation Behavior
    Development of material for extra high vacuum vessels
    Masahiro TOSA, Kazuhiro YOSHIHARA
    1990 Volume 33 Issue 5 Pages 520-524
    Published: May 20, 1990
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.33.520
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    The demand for extrahigh vacuum vessels is increasing, especially in the field of surface analysis and thin-film preparation. Therefore, the development of materials that are inert to gas adsorption is important. We have developed boron nitride-coated stainless steels using the boron nitride surface precipitation of steels doped with boron and nitrogen and found that the surface where boron nitride precipitated was inert to the adsorption of gases.
    However. boron nitride precipitated at more than 900 K. Therefore, we tried to lower the surface precipitation temperature of boron nitride.
    A mixture of type 304 stainless steel and boron nitride was deposited on the surface of a type 304 substrate with a r. f. magnetron sputtering method. Scanning Auger electron microscope observation and X-ray photoelectron spectroscopy showed that boron nitride precipitated on the surface of the deposited film and the precipitated boron nitride uniformly covered the surface after annealing at more than 600 K in high vacuum. Only small carbon and oxygen Auger peaks were observed on the surface of the precipitated boron nitride after the 3.6 ks exposure in air, indicating that the surface of this film covered with boron nitride was inert to gas adsorption.
    Therefore, film consisting of a mixture of stainless steel and boron nitride is a candidate material for low-temperature surface modification of vacuum vessels.
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  • Microstructure and Elemental Features of Vacuum-Fired (1050°C) Stainless Steel Surface
    Nagamitsu YOSHIMURA, Ichiro ANDO, Tomoshige SATO, Sachiko ADACHI
    1990 Volume 33 Issue 5 Pages 525-529
    Published: May 20, 1990
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.33.525
    JOURNAL FREE ACCESS
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    Microstructure and elemental features of three kinds of SUS304 surfaces (1050°-C fired, 950°-C fired, and as received) were investigated using a scanning electron microscope and a scanning Auger microprobe. The grain boundaries of the 1050°-C fired surface were vague and shallow due to elemental diffusion at high temperature. The oxide layer of the 1050°-C fired surface was thinner, and could be said to be finer in microstructure than those of the other surfaces. A vacuum-fired (vacuum-brazed, 1050°C) stainless steel (SUS304) chamber was evacuated by a sputterion pump. An extremely high vacuum of 1.5×10-9 Pa (N2 equivalent) was measured after mild baking (170°C) following air exposure. Vacuum-firing pretreatment has the efficient effects of degassing the gas molecules in the interior of the stainless steel walls and of removing the thick oxide layers of their surfaces.
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  • Modification of a Vacuum Surface by Carbon and its Outgassing
    Shigeki KATO, Hitoshi OYAMA, Hitoshi ODAGIRI, Edmund TAGLAUER
    1990 Volume 33 Issue 5 Pages 530-535
    Published: May 20, 1990
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.33.530
    JOURNAL FREE ACCESS
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    Reduction of outgassing from a stainless steel surface modified by carbon was studied. Carbon was deposited by ECR (electron cyclotron resonance) plasma with a CH4/H2 mixture gas. The ECR condition for a μ-wave of 2.45 GHz was obtained by permanent magnets. The outgassing rates before and after the deposition were measured using air as the test gas. The outgassing rates of residual gas species from the coated surface after an air exposure of 1 atm for 24 h typically showed a reduction of 1/3-1/5. Adsorption of water vapor on an amorphous carbon film at room temperature by low energy ion scattering was investigated in comparison with that on a stainless steel surface. It was found that water vapor adsorbed less on amorphous carbon than on stainless steel. Measurements of activation energies of the desorption of water vapor on stainless steel and carbon materials by TDS (thermal desorption spectroscopy) support the improvement of the outgassing property.
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  • The Vacuum Furnace for High Temperature Bakeout of high power Vacuum Tubes
    Yoshio SAITO, Katsuya NARUSHIMA, Yoshihiro SATO, Hiromi HISAMATSU, Nam ...
    1990 Volume 33 Issue 5 Pages 536-540
    Published: May 20, 1990
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.33.536
    JOURNAL FREE ACCESS
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  • A Survey Report on the Outgassing
    Teiichi HOMMA
    1990 Volume 33 Issue 5 Pages 541-546
    Published: May 20, 1990
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.33.541
    JOURNAL FREE ACCESS
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