Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
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Volume 10, Issue 2
Displaying 1-5 of 5 articles from this issue
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  • Chemisorption (the former part)
    Takeo OGURI
    1967 Volume 10 Issue 2 Pages 47-56
    Published: February 20, 1967
    Released on J-STAGE: January 28, 2010
    DOIhttps://doi.org/10.3131/jvsj.10.47
    JOURNAL FREE ACCESS
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  • UHV Electron Beam Evaporator
    Hiroshi NOSE, Yuji ASADA, Tadami TAOKA, Zenjiro ODA, Hideo KURODA
    1967 Volume 10 Issue 2 Pages 57-62
    Published: February 20, 1967
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.10.57
    JOURNAL FREE ACCESS
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    New UHV evaporator with electron gun has been designed for a broad range of substrate temperature and deposition rate. While the pressure is ultimately 5×10-10 torr by using a nude B-A gage, it falls down to 5×10-8 torr during evaporation of Nb. The electron beam gun has a tele-focus type and a full power of 50 kV 20 mA, and is valid in evaporation of refractory materials.
    Ferromagnetic Ni thin films are prepared in this UHV evaporator and examined by means of FMR. They have a smaller residual planar stress than those in a usual HV evaporator. Superconducting Nb thin films are also prepared and found to be abnormal in the transition temperature and critical field.
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  • Some Characteristics of Cryopump
    Keiichi NISHIDA, Shigeo MATSUI, Masayoshi YANAI
    1967 Volume 10 Issue 2 Pages 63-68
    Published: February 20, 1967
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.10.63
    JOURNAL FREE ACCESS
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    Some characteristics of a newly developed cryopump were studied, which makes a step of our serial investigations of the application of cryogenics to high-vacuum ; as a pumping method of the ultra-high vacuum thin film evaporator.
    The cryogenerator is composed of six heat exchangers, an expansion engine (reciprocating type), and two Joule-Thomson valves, as shown in Fig. 1. Cold generated by this apparatus was measured as 10 watts at 4.2°K. The generator can also be used as a helium liquefier adapting a helium container shown in Fig. 5.
    The cryopanel of which diameter is 200mm, colded by the cryogenerator, can be refrigerated down to 812°K, within two hours after starting, and the ultimate pressure was measured as 9.8×10-9 torr by B-A gauge, and 1.13×10-8 torr by RH gauge.
    The relation between pressure and cryopanel temperature is shown in Fig. 10, and composition of the residual gas was analized as shown in Fig. 11. By this analysis, the ultimate pressure seemed to be decided principally by the hydrogen, in ultra-high vacuum region.
    The pumping speed was measured as 3.0 l/sec cm2 for nitrogen gas in pressure range of10-710-4 torr, shown in Fig. 12. The pumping speed did not be affected by the deposited solid nitrogen film even its thickness assumed 1.7mm.
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  • [title in Japanese]
    [in Japanese], [in Japanese]
    1967 Volume 10 Issue 2 Pages 69-70
    Published: February 20, 1967
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.10.69
    JOURNAL FREE ACCESS
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  • [title in Japanese]
    [in Japanese]
    1967 Volume 10 Issue 2 Pages 71-78
    Published: February 20, 1967
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.10.71
    JOURNAL FREE ACCESS
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