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Volume 47, Issue 1
Displaying 1-5 of 5 articles from this issue
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Takeshi NAKAJIMA, Daisuke MIURA, Kenta YAMAMURA, Yoshimasa NIHEI, Chuh ...2004 Volume 47 Issue 1 Pages 2-6
Published: January 20, 2004
Released on J-STAGE: October 20, 2009
JOURNAL FREE ACCESSBy limiting the entrance solid angle of the display-type analyzer, new wide solid-angle electron analyzer with the simple configuration was realized. This analyzer provides “angle-resolved” and “energy-resolved” electron pattern. By using CCD camera with MCP, we measured angle-resolved energy spectra. We show typical EELS spectra of ZrB2 (0001) surface. The energy resolution and angle resolution were evaluated from the data. From LEED pattern of Si (111) - 7 × 7 surface, an angular resolution of 0.5° at the diffraction (00) spot was achieved (0.065 Å-1 at 209 eV). Ratio of the energy width to the pass energy ΔE/E0 of the analyzer were 0.017-0.022 depending on the incidence angle.View full abstractDownload PDF (854K) -
Masahiro FURUTA2004 Volume 47 Issue 1 Pages 7-13
Published: January 20, 2004
Released on J-STAGE: October 20, 2009
JOURNAL FREE ACCESSThe author had investigated fluoride thin films made by sputtering, which is conducted with introducing a continuous Ar gas flow. The fluoride thin film made in such way, however, had not shown good optical characteristics. The author had hit upon a consideration to classify the fluorides from the viewpoint of their melting point (M.P.) and boiling point (B.P.). The M.P. B.P. classification of fluorides could well explain why sputtering does not make good MgF2 thin film.
On the other hand, the author had invented the Self Re-Combination (SRC) sputtering process. This SRC sputtering is able to make the fluoride thin films on the SiO2 substrate and the Si substrate. This time, the author has invented the Multi cathode Re-Combination (MRC) sputtering process, which is improved from the SRC sputtering process for MgF2. The MgF2 thin film made by this MRC sputtering has shown a quite small absorption coefficient, less then 0.001 at 193 nm wavelength. This MRC sputtering is conducted without introducing fluorine gas, which means the MRC gives us a simple and a safety process.View full abstractDownload PDF (923K) -
Eiichi KOBAYASHI, Kouji ISARI, Masanobu MORI, Kazuhiko MASE, Koji OKUD ...2004 Volume 47 Issue 1 Pages 14-21
Published: January 20, 2004
Released on J-STAGE: October 20, 2009
JOURNAL FREE ACCESSCoincidence measurement of energy-selected electrons and mass-selected ions (electron-ion coincidence (EICO) spectroscopy) is a powerful technique to clarify ion desorption mechanism induced by electron transitions, because excited states leading to ion desorption is directly identified. Information on the coincidence ions, however, is limited to the mass and the yield so far. In order to obtain information on kinetic energy and desorption polar angle of ions, we have developed a new polar-angle-resolved miniature time-of-flight ion mass spectrometer (TOF-MS), which can be used for EICO spectroscopy. The TOF-MS consists of a shield for electric field, an ion drift electrode with three meshes, and microchannel plates with three concentric anodes. By using SIMION 3D version 7.0 we simulated ion trajectories of H+ for the TOF-MS with a drift bias of -30 V. The results show that the desorption angles of H+ with a kinetic energy of 3 eV detected by the innermost anode, the intermediate anode, and the outermost anode are 0°17°, 22°48°, and 57°90°, respectively. The performance of the TOF-MS was evaluated by measuring H+ yield spectra and Auger electron-H+coincidence spectra of condensed water (H2O).View full abstractDownload PDF (1834K) -
Shin KAMADA, Tadashi SAWADA, Wataru SUGIYAMA, Masuhisa YABUKI, Manabu ...2004 Volume 47 Issue 1 Pages 22-28
Published: January 20, 2004
Released on J-STAGE: October 20, 2009
JOURNAL FREE ACCESSA theory about the effects of species of gases and the change in radial clearances on the pumping performance of a scroll vacuum pump is presented. The temperature distribution on the orbiting and fixed scrolls is obtained considering the heat generation by gas compression and the heat transmission to the atmosphere. The temperature of the orbiting scroll rises higher than that of the fixed scroll because the fixed scroll is cooled more easily than the orbiting scroll. Then the clearance change under the obtained temperature distribution is calculated, and the ultimate pressure of the pump having the changed clearances is predicted. The predicted ultimate pressure agrees fairly well with the measured one throughout the experimented range of orbiting speed for nitrogen and helium. For argon, a little difference is seen between the predicted and measured values in the low orbiting speed, however the difference is smaller than that of previous theories.View full abstractDownload PDF (798K) -
Takashi TAGUCHI, Yuji YAMAUCHI, Yuko HIROHATA, Tomoaki HINO, Ichiro YA ...2004 Volume 47 Issue 1 Pages 29-32
Published: January 20, 2004
Released on J-STAGE: October 20, 2009
JOURNAL FREE ACCESSPolycrystalline copper at room temperature was irradiated with 5 keV helium ions by changing the incident angle and the ion fluence. The surface morphology was observed for the irradiated Cu. Many blisters with different sizes were observed on the irradiated sample. With the increase of incident angle, θ, (up to 45°), the average size of the blister remained almost the same while the surface density of the blister decreased. When the incident angle was 67.5°, the average size and height of blister became large owing to the blister evolution. In the case of θ=67.5°, the surface density of the blister rapidly decreased, and the size of the blister gradually increased with the increase of ion fluence.View full abstractDownload PDF (994K)
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