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Volume 40, Issue 10
Displaying 1-6 of 6 articles from this issue
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Kenji ODAKA1997 Volume 40 Issue 10 Pages 761-766
Published: October 20, 1997
Released on J-STAGE: October 20, 2009
JOURNAL FREE ACCESSOutgassing rates from a turbomolecular pump (TMP) were measured for two different roughing pump systems, a rotary pump (RP) and a combination of another TMP and the rotary pump (tandem operation). The TMP tested was a TPU 170 (Balzers) with a nominal pumping speed of 0.17 m3s-1 for N2. Before baking, no difference was found in the outgassing rates from the TMP for the two roughing pump systems. In an ultimate pressure region after baking, the out-gassing rate was 2.1 × 10-9 Pa·m3s-1 with the RP and 8.2 × 10-10 Pa·m3s-1 in tandem operation. The outgassing rate originating from the TMP parts and the amount of gas passing through the TMP from an outlet to an inlet were evaluat-ed to be 8.2 × 10-10 Pa·m3s-1 and 1.3 × 10-9 Pa·m3s-1, respectively. On comparing these results with those of another type of TMP, it was found that the outgassing rate from a TMP is useful for the analytical evaluation of the effects of materials, surface treatments and configurations of a TMP on its performance.View full abstractDownload PDF (827K) -
Hajime KOYANAGI, Sumio HOSAKA, Kimio NAKAMURA, Atsushi KIKUKAWA, Kimit ...1997 Volume 40 Issue 10 Pages 767-772
Published: October 20, 1997
Released on J-STAGE: October 20, 2009
JOURNAL FREE ACCESSTo clarify the possibility of ultrahigh-density recording with an areal density of more than 1 Tb/in2, we investigated ultrahigh-density writing and high-speed reading using an atomic force microscope (AFM). Nanometer-sized pits were formed through plastic deformation of the surface of the polycarbonate (PC) disk, which was pressed by an AFM tip; in addition, nanobit writing with a bit interval of 20 nm and a track interval of 40 nm was demonstrated. In high-speed reading, the motion of the tip following the PC surface with nanostructures was detected in the prototype of a disk AFM recording system with a high resonant frequency cantilever, and reading with a period of 1.2 μs was conducted. These results indicate that AFM-based recording may be used to attain a recording density of 1.2 Tb/in2 and a readout speed of 1.25 Mb/s in a rate 1/2 (2, 7) code.View full abstractDownload PDF (1433K) -
Naoto MATSUO, Tadaki MIYOSHI1997 Volume 40 Issue 10 Pages 773-779
Published: October 20, 1997
Released on J-STAGE: October 20, 2009
JOURNAL FREE ACCESSThe purpose of this paper is to investigate both the orientation dependence of the adsorption of organic carbons on the Si surface in the water and the relationship between carbon adsorption and native oxide accounting for the concentration of the total organic carbon using thermal desorption spectroscopy and X-ray photoelectron spectroscopy. The surface morphology of Si after HF dipping is examined using the atomic force microscopy. The number of the organic carbons adsorbed on the (100) surface is larger than that adsorbed on the (111) surface. This phenomenon agrees with the orientation dependence of the native oxide growth, and also indicates that the carbon adsorption has a close relationship with the native oxide growth. From the relationship between the adsorption theory and the experimental data, it is found that carbon adsorption on the Si surface in water is controlled by the surface reaction between organic carbons and native oxide. From the result showing that the mean surface roughness after HF dipping has little orientation dependence, it is thought that the microroughness and step edge do not serve as the dominant adsorption site of organic carbons. It is important to consider the coulomb force between the carrier with the electric charge in the native oxide and the organic carbons.View full abstractDownload PDF (945K) -
Axial-Symmetric Transmission Gauge (AT gauge)Hitoshi AKIMICHI, Takao ARAI, Tomonari TANAKA, Naoki TAKAHASHI, Yujiro ...1997 Volume 40 Issue 10 Pages 780-791
Published: October 20, 1997
Released on J-STAGE: October 20, 2009
JOURNAL FREE ACCESSThe characteristics of a new ionization gauge for pressure measurement in XHV were examined by experiments and computer simulations. The new gauge (axial-symmetric transmission gauge : AT gauge) has a Bessel-Box type energy filter between a B-A gauge type ionizer and a secondary electron multiplier as an ion collector to eliminate the limiting factors of pressure measurement in XHV, such as the X-ray effect and electron stimulated desorption (ESD) ions. The lower limit of the pressure measurement at present is estimated to be about 10-12 Pa. The sensitivity factor of the AT gauge, which was further corrected for the effect of outgassing by the conductance modulation method (CMM), is almost constant in the pressure range from 10-10 to 10-6 Pa and is (2.3±0.1) ×10-3 Pa-1 for hydrogen.View full abstractDownload PDF (1682K) -
Touichi HATANO1997 Volume 40 Issue 10 Pages 792-795
Published: October 20, 1997
Released on J-STAGE: October 20, 2009
JOURNAL FREE ACCESSDownload PDF (391K) -
Shigemi SUGINUMA, Masahiro HIRATA1997 Volume 40 Issue 10 Pages 796-799
Published: October 20, 1997
Released on J-STAGE: October 20, 2009
JOURNAL FREE ACCESSFour nude type Bayard-Alpert gauges attached in nipples of different inner diameters of 35, 38, 54 and 70 mm, were calibrated for nitrogen at the emission currents of 0.4, 1 and 4 mA using a spinning rotor gauge as a reference standard. The sensitivity coefficient of the gauges was influenced considerably by the diameter of the nipple and the emission current. All of the gauges attached in the 70 mm-diameter nipple showed a good stability of the sensitivity coefficient in the pressure region from 1×10-5 Pa to 3×10-2 Pa at the emission current of 0.4 mA. The change in the sensitivity coefficient was also discussed from the viewpoint of the distribution of the electric potential inside the nipple and the space charge effect of electrons and ions.View full abstractDownload PDF (528K)
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