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Volume 41, Issue 8
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Shigemi SUGINUMA, Masahiro HIRATA1998 Volume 41 Issue 8 Pages 679-684
Published: August 20, 1998
Released on J-STAGE: October 20, 2009
JOURNAL FREE ACCESSSensitivity coefficient of a nude-type Bayard-Alpert gauge depends on the diameter of an envelope. In our measurement on four gauges, sensitivity coefficients of three gauges in small envelopes (inner diameter of 35, 38 mm) were higher by 2040% than those in large envelopes (54, 70 mm) for nitrogen in high vacuum 10-4 Pa. One gauge showed small dependence of the coefficient on the diameter. In order to discuss these experimental results, an electric potential distribution and an electron trajectory inside the envelope were calculated using a super-computer. And a sensitivity coefficient was estimated using the potential distribution and the electron trajectory. The estimation showed that the coefficient of a gauge with a wide gap (3 mm) between a grid and a filament has the same dependence on the diameter as those of three gauges and the coefficient of a gauge with a narrow gap (1 mm) has small dependence on the diameter. Large envelope gives small dependence of the coefficient on the gap.View full abstractDownload PDF (762K) -
Yasuhiko CHINZEI, Masanori OZAWA, Toshiaki KIKUCHI, Keiji HORIOKA, Har ...1998 Volume 41 Issue 8 Pages 685-691
Published: August 20, 1998
Released on J-STAGE: October 20, 2009
JOURNAL FREE ACCESSMeasurements of the ion species generated in the neutral loop discharge (NLD) plasma of tetrafluoroethyl trifluoromethyl ether (HFE 227) demonstrateddd higher density of CF2+, CF3+ and C2F4+ ions than that of CF1+ ions. However, the etch selectivity of BPSG/resist was low in the HFE 227 plasma. Si (CH3) 3H (trimethylsilane) was added as a Si source to HFE 227 to enhance the selectivity and reduce the retardation of the resist sidewall. As a results, 0.15 μm in diameter holes with an aspect ratio of 15 were successfully fabricated. QMS and AMS measurements implied that the ultra high aspect feature was fabricated by the contribution of C2F4+ ions under lower density of radicals. Furthermore, the microloading-free etching was achieved at Vdc=-500 V for patterns till 0.15 μm holes and 50 nm line & 20 nm space patterns defined by electron beam lithography were also fabricated.View full abstractDownload PDF (1056K) -
Tatsuo ASAMAKI, Sayaka NARUSHIMA, Tetsuji TSUKADA1998 Volume 41 Issue 8 Pages 692-697
Published: August 20, 1998
Released on J-STAGE: October 20, 2009
JOURNAL FREE ACCESSAiming at increase of the discharge volume of crossed electric and magnetic field domain, egg type magnetron gauge cathodes, a surface along the magnetic force line from a magnetic pole to the other pole, are investigated. Three egg type magnetron gauges, one with magnetic end plates, one with small pole pieces and one with large pole pieces are compared to study the effects of increasing the discharge volume of the field domain. It is found that the sudden changes of the discharge current are eliminated except the egg type one without any pole pieces at lower discharge voltage of 1 to 3 kV, and good lineariy is achieved. The gauge with small pole pieces which has magnetic flux density of 0.108 T at 1.8 mm from cathode surface, shows the best characteristics, the sensitivity I/P=2.4 and 2.7 [×10-2 A/Pa], and slope n [log I2/I1/logP2/P1] =1.26 and 1.20 at discharge voltage of 6 kV and 4 kV, respectively.View full abstractDownload PDF (1036K) -
Kenji ODAKA, Osamu SATOH1998 Volume 41 Issue 8 Pages 698-702
Published: August 20, 1998
Released on J-STAGE: October 20, 2009
JOURNAL FREE ACCESSOutgassing rates from a turbomolecular drag pump (TDP) are measured and compared with those from a turbomolecular pump with axial stages only (TAP). Before baking, outgassing rates of both types of TMPs fit the same time-dependent curve. After baking, on the other hand, outgassing rates of the TDP are 1/3 to 2/3 of those of the TAP. The structure, material, surface finish, and contamination might affect the outgassing rates. So, the current results show that we can evaluate quantitatively the effect of these factors on pumping performance using outgassing rates.View full abstractDownload PDF (561K) -
Yukio INOKUTI, Kazuhiro SUZUKI, Osamu OHKUBO, Natsuki TAKAHASHI1998 Volume 41 Issue 8 Pages 703-708
Published: August 20, 1998
Released on J-STAGE: October 20, 2009
JOURNAL FREE ACCESSA new method of differential-pressure sealing of the air-to-air type (pilot line) continuous hollow cathode discharge (HCD) plasma coating line was developed. The characteristic features of the air-to-air type sealing apparatus include (1) coupled sealing structure consisting of a single guide roller and a seal attachment, (2) specially designed seal attachment structure for wrapping thin sheets around a guide roller, thereby enabling the accomplishment of a good differential-pressure seal, and (3) the six chambers made of the step-by-step differential-pressure seal stages.
This continuous air-to-air line differential-pressure seal apparatus is considerably free from vibration and noise components due to the formation of a smooth seal on the steel sheet. It is possible to accomplish a stable high vacuum of 0.066 Pa for a long duration. In comparison to other typical differential-pressure seal apparatuses this apparatus exhibits the most superior sealing operation.View full abstractDownload PDF (738K) -
Yukio INOKUTI, Kazuhiro SUZUKI, Osamu OHKUBO, Natsuki TAKAHASHI1998 Volume 41 Issue 8 Pages 709-712
Published: August 20, 1998
Released on J-STAGE: October 20, 2009
JOURNAL FREE ACCESSPre-heating apparatus of the air-to-air continuous plasma ion plating apparatus performs step-by-step pre-heating by the combination of two hotrollers and two electron beam irradiation apparatuses that are controlled automatically.
In order to establish a good adhesion between the steel substrate and the evaporant (TiN), it is essential to pre-heat the steel sheet prior to plasma coating and to do free it from any deformations caused by pre-heating.
The results of the 180° bend test performed after TiN coating reveal that pre-heating results in good adhesion between the stainless steel sheet and TiN overcoated layer. The importance of controlling the pre-heating apparatus such that there is no deformation of the steel sheet in the width-direction is also described.View full abstractDownload PDF (523K) -
Kenya AKAISHI, Kazuhiro EZAKI, Yusuke KUBOTA, Osamu MOTOJIMA1998 Volume 41 Issue 8 Pages 713-717
Published: August 20, 1998
Released on J-STAGE: October 20, 2009
JOURNAL FREE ACCESSThe effect of neon glow discharge cleaning (GDC) for the reduction of water outgassing using a 304 stainless steel chamber was studied. A pumping line through an orifice of limited pumping speed to 10 l/s and a normal pumping system of pumping speed of 180 l/s were prepared for the pump-down of the chamber during and after GDC. When the pump-down of the chamber after exposure to air was carried out, the pressure decreased in inverse proportion to time in the pumping period up to 72 h and reached a steady constant value in the pumping period over 72 h. The attained pressure after the trial of GDC with the ion dose of 0.5 Coulomb/cm2 in the time dependent range of pressure was nearly the same as that by only the normal pumping system without help of GDC. This result was interpreted as that the desorbed water from the chamber wall by GDC is not so effectively pumped out of the chamber, because of the dependence of removal rate of water on pumping speed. Therefore, the pumping speed of the normal pumping system was increased further to 270 l/s using a cryopump and the chamber was pumped until a steady constant pressure of the order of 1×10-6 Pa was achieved. Then the trial of GDC for further pressure improvement was made 3 times every other day from the pumping time of near 25 h. As a result, the pressure was improved by 2 orders of magnitude from 1.3×10-6 to 1.3×10-8 Pa. It was presumed that this result is caused by the dissociation of adsorbed water on the chamber surface during GDC.View full abstractDownload PDF (716K) -
1998 Volume 41 Issue 8 Pages 769
Published: 1998
Released on J-STAGE: October 20, 2009
JOURNAL FREE ACCESSDownload PDF (111K)
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