MgO is utilized to protect dielectric layer inside PDP (Plasma Display Panel). The TDS (Thermal Disorption Spectroscopy) measurements of MgO have been conducted to elucidate the outgassing mechanism of PDP. The main outgassed species are H
2O and CO
2. In the TDS spectra of H
2O and CO
2 three desorption peaks and single peak were observed respectively. The kinetic order of desorption is first for every peak, and the activation energies of desorption are 24 ± 3, 35.0 ± 0.7, 62 ± 1 kcal/mol for H
2O, and 35.5 ± 0.7 kcal/mol for CO
2. By using the Langmuir model, the outgassing curve was calculated. Assuming 1.5 × 10
-4 for the sticking probability of H
2O and CO
2, the calculated evacuation curves became almost the same as a measured curve. It was found that the evacuation time can be decreased to a half of that at 370°C by the increase of baking temperature up to 390°C.
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