Shinku

Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516

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Volume 36, Issue 3

Displaying 1-50 of 73 articles from this issue

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A Model of Gas Desorption Mechanism (II)

Gen'ichi HORIKOSHI

1993 Volume 36 Issue 3 Pages 139-141
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.139

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H₂O Desorption Behavior of Graphite as Nuclear Fusion Materials

Masao OKITA, Yuko HIROHATA, Tomoaki HINO, Toshiro YAMASHINA

1993 Volume 36 Issue 3 Pages 142-144
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.142

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Transmission Probabilities of Gas Molecules Through Finite Length Tubes in Transition Range

Masahiro OTA, Hiroyoshi TANIGUCHI

1993 Volume 36 Issue 3 Pages 145-147
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.145

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Kinetic Theory Analysis of Steady Evaporating Flows from a Spherical Condensed Phase into a Vacuum

Hiroshi SUGIMOTO, Yoshio SONE

1993 Volume 36 Issue 3 Pages 148-151
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.148

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Effect of the Content of Water Vapor in the Gas Admitted into a Vacuum Chamber on Pump Time

Kazue TAKAHASHI, Manabu EDAMURA

1993 Volume 36 Issue 3 Pages 152-154
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.152

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Depth Profiles of a Glass Thin Film

Atsuko SAMIZO, Hirotaka FURUKAWA, Yuji NAGASAWA, Toshiyuki KATSUKI

1993 Volume 36 Issue 3 Pages 155-157
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.155

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XPS Measurements of 80 K-phase Bi-based Bulk Single Crystals

Yasuo MITANI, Satoru KISHIDA, Makoto KATAYAMA, Heizo TOKUTAKA, Katsumi ...

1993 Volume 36 Issue 3 Pages 158-160
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.158

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The Formation of Electrodes on the Surface of Bi-Sr-Ca-Cu-O Superconductors

Hiroya IMAO, Yuichi MATSUO, Yasuo MITANI, Satoru KISHIDA, Heizo TOKUTA ...

1993 Volume 36 Issue 3 Pages 161-163
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.161

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The Y₂O₃ Growth on Bi-based Bulk Single Crystal Surfaces

Hiroyuki TSUCHIDA, Katsumi NISHIMORI, Heizo TOKUTAKA, Satoru KISHIDA, ...

1993 Volume 36 Issue 3 Pages 164-166
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.164

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Preparation and Electron Emission Property of Sc-Type Impregnated Cathode

Sadanori TAGUCHI, Yukio SUZUKI, Shunji SAITO

1993 Volume 36 Issue 3 Pages 167-170
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.167

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Thermal Desorption Spectroscopy Characterization on Electron-Beam Remelting Vacuum Materials

Jiro ISHIBE, Akikazu KITAGAWA, Motomitu SUZUKI, Akio KOMURA, Maki SUEM ...

1993 Volume 36 Issue 3 Pages 171-174
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.171

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Measurement of Outgassing Rate by Conductance Modulation Method

Michio MINATO, Yoshio ITOH

1993 Volume 36 Issue 3 Pages 175-177
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.175

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Development of a Rotatable Large-Seal used in Ultra-High Vacuum Equipments

Yutaka KANEKO, Shigehiko YAMAMOTO, Tatsuya MIYAKE, Yoshimasa KONDOH

1993 Volume 36 Issue 3 Pages 178-181
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.178

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Development of Analysing System for CVD Reaction Mechanism using Molecular Beam Sampling Method

Yoshitsugu TSUTSUMI, Masato IKEGAWA, Tatehito USUI, Jun'ichi KOBAYASI, ...

1993 Volume 36 Issue 3 Pages 182-184
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.182

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Flying and Adhesion Phenomena of Small Particles Under Low Pressure Condition

Hiroaki ISHIKAWA, Satoru KOTOH, Koichro TSUTAHARA

1993 Volume 36 Issue 3 Pages 185-188
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.185

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Evacuation Characteristics of Grooved Axial Flow Pump at High Back Pressuers

Tatsuo KANKI, Tsuyosi ASANO, Toshikazu KANBE, Ryuichi SAKAMOTO, Hirorn ...

1993 Volume 36 Issue 3 Pages 189-191
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.189

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Development of Distributed Ion Pump for the SPring-8 Storage Ring

Toshiaki KOBARI, Manabu MATSUMOTO, Tsuneo TORII, Yutaka ITOU, Kowashi ...

1993 Volume 36 Issue 3 Pages 192-195
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.192

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Pumping Characteristics of Louver Blind Cryopump

Effect of Inlet Hight on Transmission Probability

Yasushi IWASA, Hirotsugu OHGUMA, Kunio WAKABAYASHI, Hirohisa TAKANO

1993 Volume 36 Issue 3 Pages 196-199
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.196

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Characteristics of Compact Electron Beam Excited Plasma source and Control of Floating Potential

Manabu HAMAGAKI, Tamio HARA

1993 Volume 36 Issue 3 Pages 200-202
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.200

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Temperature Distribution of Evaporation Surface Heated by Electron Beam

Hironori OHBA, Koichi OGURA, Takemasa SHIBATA

1993 Volume 36 Issue 3 Pages 203-206
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.203

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Measurments of Velocity of Gadolinium Atomic Beam Using Electromagnetic Force Balance and Langmuir Probes

Koichi OGURA, Takemasa SHIBATA

1993 Volume 36 Issue 3 Pages 207-210
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.207

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Accurate Control of Surface Characteristics of Glassy Carbon by Hybrid Plasma Treatment

Takeo OHTE, Sugio OHTANI, Akira KOJIMA, Masaaki KATOH

1993 Volume 36 Issue 3 Pages 211-214
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.211

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W/C Multilayers Sputtered on Polyimide Substrates

Tsukasa MIYAZAKI, Shoji SEKI, Motoshige TATSUMI, Koujun YAMASHITA

1993 Volume 36 Issue 3 Pages 215-218
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.215

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MgO Thin-Film Growth on Si (100) by Excimer Laser Ablation

Satoru KANEKO, Seishiro OHYA, Ken KOBAYASHI, Shiro KARASAWA

1993 Volume 36 Issue 3 Pages 219-222
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.219

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XRD peaks showed that (100) -preferred oriented thin film grows at substrate temperature ranging from 300 to 550°C. MgO thin film with (100) orientation grew at 500°C. At 600°C the (111) peak increased markedly. The FWHM of XRD at the (100) peak decreased with increasing substrate temperature.
At a substrate temperature of 300 to 550°C, (100) -preferred orientation of the crystalline state was observed. The (100) peak ratio is independent of O₂ gas pressure except at high substrate temperatures. The ratio decreased with increasing O₂ gas pressure at 600°C. The FWHM of XRD at the (100) peak is also independent of O₂ gas pressure.
We wish to thank F. Togashi of Science Univ. of Tokyo, Y. Hirabayashi and T. Watanabe for useful discussion and suggestions.

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Fabrication of Superconducting YBa₂Cu₃O_x Thin Film with Plasma Monitoring

Yoshiharu KAKEHI, Tadaoki KUSAKA, Tsutom YOTSUYA, Yoshihiko SUZUKI, So ...

1993 Volume 36 Issue 3 Pages 223-225
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.223

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The Dependence on Deposition Conditions related to High Tc of Deposited YBCO Thin Films by Oxygen ion assisted Deposition

Masao NOMA, Masami NAKASONE, Souichi OGAWA, Tsutom Yotsuya, Yoshihiko ...

1993 Volume 36 Issue 3 Pages 226-229
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.226

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Outgassing Rate of Beryllium-copper Plate and Alumina Plate

Takao HANASAKA, Kowashi WATANABE, Shigeru YOKOUCHI, Yuuzo NIIOKA, Suck ...

1993 Volume 36 Issue 3 Pages 230-233
Published: March 20, 1993
Released on J-STAGE: January 29, 2010

DOIhttps://doi.org/10.3131/jvsj.36.230

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Outgassing Rate of Stainless Steel Chamber Measured by XHV Throughput System

Yixin YANG, Kazuya SAITOH, Sakae INAYOSHI, Yoshinao IKEDA, Sonoko TSUK ...

1993 Volume 36 Issue 3 Pages 234-237
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.234

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Thermal Desorption Spectroscopy of Stainless Steel Plates with Different Surface Treatments

Sakae INAYOSHI, Kazuya SAITOH, Yoshinao IKEDA, Yixin YANG, Sonoko TSUK ...

1993 Volume 36 Issue 3 Pages 238-241
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.238

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Behavior of Outgassing from Materials after Irradiated by Synchrotron Radiation

Manabu MATSUMOTO, Toshiaki KOBARI, Shinjiro UEDA, Yoichiro HORI, Masan ...

1993 Volume 36 Issue 3 Pages 242-244
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.242

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Measurement of the Hydrogen Pumping Characteristics of a Bakeable Circulation-Refrigerator-Cryopump

Takao ARAI, Kyoko TAKEUCHI, Yutaka TUZI, Yutaka MATSUI, Hiroyuki YAMAK ...

1993 Volume 36 Issue 3 Pages 245-248
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.245

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Initial Pumping Characteristics of Oxygen Free Copper Duct

Yoshiki YAMAMOTO, Yasuchika NAGAI, Yoshio SAITO, Namio MATSUDA, Tadash ...

1993 Volume 36 Issue 3 Pages 249-252
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.249

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Magnetic Levitation Transport System for Extremly High Vacuum

Masahiro TOSA, Akiko ITAKURA, Kazuhiro YOSHIHARA

1993 Volume 36 Issue 3 Pages 253-256
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.253

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Influence of Surface Treatment on Secondary Electron Emission of Alumina Ceramics

Hidemasa KAWAI, Hironori MATSUURA, Shinichiro MICHIZONO, Yoshio SAITO, ...

1993 Volume 36 Issue 3 Pages 257-259
Published: March 20, 1993
Released on J-STAGE: January 30, 2010

DOIhttps://doi.org/10.3131/jvsj.36.257

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Dielectric Property of High-power rf Window and its Breakdown Phenomena

Shinichiro MICHIZONO, Yoshio SAITO, Shouzo ANAMI, Akira KINBARA

1993 Volume 36 Issue 3 Pages 260-262
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.260

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Fabrication of Electromagnetic Force Balance for Vacuum Applications

Masanori HAMAZAKI, Tetsuya ABE, Yoshio MURAKAMI

1993 Volume 36 Issue 3 Pages 263-265
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.263

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Development of an Electron-Beam-Excited Plasma SNMS SNART (2)

James W. BRADLEY, Shigeki KATO

1993 Volume 36 Issue 3 Pages 266-270
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.266

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We report on the further development of a sputtered neutral mass spectrometer known as SNART (sputtered neutral analysis-RIKEN type) which has been developed to provide a means for quantitative analysis of bulk or surface compositions of both insulating and conducting materials. In this system both high sputter-etch rates (few nm/s) at low bombarding energy (about 100 eV) and high postionization probabilities (20%) are achievable using a dense (10¹³ cm^-3) magnetically confined argon plasma discharge driven by a low-energy electron beam (100 eV) with typical beam current of 1-2 A.
SNART has potential for high detection sensitivity and capability for both insulator analysis without a charge neutralizer and high depth resolution with quick analysis.
The relative sensitivity factors for trace elements in both conducting and insulating samples at standard operating conditions have been determined and the machine performance as a function of the operating conditions investigated.

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Microwave Ion Source for Thin Oxide Film Formation

Hiroshi MURAKAMI, Kazumi WATAHIKI, Akira IWASAKI, Isao KUDO

1993 Volume 36 Issue 3 Pages 271-274
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.271

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Hydrogen Plasma Durability of the Fluorinated SnO₂ Thin Films

Keishi KAWABATA, Yuuichi TAKENAKA, Hideaki SUNAMORI, Takeshi TANAKA

1993 Volume 36 Issue 3 Pages 275-277
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.275

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Surface Improvement of SnO₂ Thin Films by Steam Treatment

Keishi KAWABATA, Sadafumi OKITA, Hayato ENDOU, Yuuichirou OKI, Takeshi ...

1993 Volume 36 Issue 3 Pages 278-281
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.278

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Transparent Conductive Films of CuI Prepared by Vacuum Evaporation

Keishi KAWABATA, Shingo KAYANO, Takeshi TANAKA

1993 Volume 36 Issue 3 Pages 282-284
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.282

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The Dependence on Substrate Temperature related to Metal Composition of Deposited YBCO Thin Films by Oxygen Ion Irradiation

Masami NAKASONE, Masao NOMA, Soucihi OGAWA, Tsutom Yotsuya, Yoshihiko ...

1993 Volume 36 Issue 3 Pages 285-288
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.285

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Au-C Thin Films Prepared by Low Energy Sputtering Deposition in Ar and CH₄ Mixture Gas

Akio OKAMOTO, Masaaki YOSHITAKE, Toshikazu NOSAKA, Yoshihiko SUZUKI, S ...

1993 Volume 36 Issue 3 Pages 289-291
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.289

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Study on Fabrication of Multilayer Zone Plate for Hard X-Rays

Shigeharu TAMURA, Kazuo OHTANI, Nagao KAMIJO

1993 Volume 36 Issue 3 Pages 292-294
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.292

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Generation and Suppression of DC Self-Bias Voltage in Parallel-Plate RF Discharges

Itsuo ISHIKAWA, Kazuya NAGASEKI, Eiichi NISHIMURA, Yukinori SAITO, Shi ...

1993 Volume 36 Issue 3 Pages 295-298
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.295

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Floating Potential of a Substance Mounted on Grounded Electrode in 1MHz RF Discharge

Hidehiko KOBAYASHI, Itsuo ISHIKAWA, Kazuya NAGASEKI, Shinji SUGANOMATA

1993 Volume 36 Issue 3 Pages 299-302
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.299

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Development of a Probe Measurement System Applicable to the Discharge for Ion Plating

Kunio OKIMURA, Akira SHIBATA

1993 Volume 36 Issue 3 Pages 303-305
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.303

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Surface Flashover Characteristics of Alumina Insulators in Vacuum

Shinichi KOBAYASHI, Kazutoshi KIYOKAWA, TUMIRAN, Yoshio SAITO, Noriak ...

1993 Volume 36 Issue 3 Pages 306-309
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.306

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Friction Properties in a Vacuum for Alunimum Base Composites Containing Cluster Diamonds

Katsuzo OKADA, Kiyoto MATSUSHITA, Quyang Qin

1993 Volume 36 Issue 3 Pages 310-312
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.310

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Reduction of Heat Load to Liquid Helium Pipe with Multi-layer Insulator by Thermal Anchor

Takemasa SHIBATA, Masayuki DAIRAKU, Kiyoshi SHIBANUMA, Takuya TERAKADO

1993 Volume 36 Issue 3 Pages 313-315
Published: March 20, 1993
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.36.313

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