Shinku

All issues

Volume 37, Issue 3

Displaying 51-71 of 71 articles from this issue

Download citation

Show all abstracts

Electrical Breakdown Strength of Vacuum Gaps between Vacuum Degassed Oxygen-Free Copper Electrodes Machined by Diamond Turning for Mirror Finish

Shinichi KOBAYASHI, Yasuyuki HASHIMOTO, Yoshio SAITO, Yoshiki YAMAMOTO ...

1994Volume 37Issue 3 Pages 289-291
Published: March 20, 1994
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.37.289

JOURNAL FREE ACCESS

Download PDF (498K)
Simulation of Pump-Down Behavior and Photodesorption in Synchrotron Ring

Satoru SUKENOBU

1994Volume 37Issue 3 Pages 292-295
Published: March 20, 1994
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.37.292

JOURNAL FREE ACCESS

Download PDF (459K)
Vacuum Performance of SORTEC 1-GeV 500 mA SOR Ring

Ken MUKUGI, Takeshi KISHIMOTO, Makio WATANABE, Mitsugu ARAKI, Naoki AW ...

1994Volume 37Issue 3 Pages 296-300
Published: March 20, 1994
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.37.296

JOURNAL FREE ACCESS

Download PDF (548K)
Depelopment of a Dust Monitor in a Vaccum for a Bare (Mirror-polished) Si Wafer

Hideyuki SUGASAWA, Tohru OKUNO, Yutaka MATUSI

1994Volume 37Issue 3 Pages 301-304
Published: March 20, 1994
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.37.301

JOURNAL FREE ACCESS

Download PDF (448K)
Magnetic Leviation Transport Using Superconducting Oxide

Masahiro TOSA, Akiko ITAKURA, Masaaki HARADA, Kazuhiro YOSHIHARA, Hiro ...

1994Volume 37Issue 3 Pages 305-307
Published: March 20, 1994
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.37.305

JOURNAL FREE ACCESS

Download PDF (644K)
1 MHz Paral-Plellate Discharges in Etching Gases : CF₄ and SF₆

Hidehiko KOBAYASHI, Hideki KUSUNOKI, Itsuo ISHIKAWA, Kazuya NAGASEKI, ...

1994Volume 37Issue 3 Pages 308-311
Published: March 20, 1994
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.37.308

JOURNAL FREE ACCESS

Download PDF (442K)
Large-Area Electron Cyclotron Resonance Plasma Source with Permanent Magnets (1)

Plasma Characteristics

Takashi INOUE, Tadayoshi OGAWA, Wataru MIYAZAWA, Yukio OKAMOTO, Shoji ...

1994Volume 37Issue 3 Pages 312-315
Published: March 20, 1994
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.37.312

JOURNAL FREE ACCESS

Download PDF (402K)
Large-Area Electron Cyclotron Resonance Plasma Source with Permanent Magnets (2)

Etching Characteristics

Takashi INOUE, Tadayoshi OGAWA, Wataru MIYAZAWA, Yukio OKAMOTO, Shoji ...

1994Volume 37Issue 3 Pages 316-318
Published: March 20, 1994
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.37.316

JOURNAL FREE ACCESS

Download PDF (333K)
Compact High Density Radical Source

Hideaki SATO, Wataru MIYAZAWA, Takashi INOUE, Shoji DEN, Yuzo HAYASHI, ...

1994Volume 37Issue 3 Pages 319-321
Published: March 20, 1994
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.37.319

JOURNAL FREE ACCESS

Download PDF (336K)
Electrical and Optical Properties of a-Ge_1-xSe_x : H films Prepared by Reactive-Plasma-Assisted Deposition

Shoji YOSHIOKA, Nobuo SAITO, Shigeaki NAKAMURA, Akira TUJIMURA

1994Volume 37Issue 3 Pages 322-325
Published: March 20, 1994
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.37.322

JOURNAL FREE ACCESS

Download PDF (508K)
Properties of Au-CH Thin Films prepared by Low Energy Plasma Sputtering in Ar and CH₄ mixture gas

Akio OKAMOTO, Toshikazu NOSAKA, Masaaki YOSHITAKE, Yoshihiko SUZUKI, S ...

1994Volume 37Issue 3 Pages 326-328
Published: March 20, 1994
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.37.326

JOURNAL FREE ACCESS

Download PDF (330K)
The Effects of Substrate Temperature on the Properties of ZnO : Al Thin Films Prepared by RF Magnetron Sputtering

Yasuhiro IGASAKI

1994Volume 37Issue 3 Pages 329-332
Published: March 20, 1994
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.37.329

JOURNAL FREE ACCESS

Download PDF (746K)
The Preparation of SnO₂ Thin Film by Facing-Target-Type Sputtering Method

Improvement of Sensitivity by Heattreatment

Hirohisa WATANABE, Satoru ABE, Masahiro KODANI, Eiji MIZOGUCHI, Tomoyu ...

1994Volume 37Issue 3 Pages 333-335
Published: March 20, 1994
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.37.333

JOURNAL FREE ACCESS

Download PDF (404K)
Preparation and Properties of Pb (Zr, Ti) O₃ Thin Films by Multi-Target Sputtering

Kazuo HIRATA, Naokichi HOSOKAWA, Takashi HASE, Toshiyuki SAKUMA, Yoich ...

1994Volume 37Issue 3 Pages 336-339
Published: March 20, 1994
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.37.336

JOURNAL FREE ACCESS

Download PDF (505K)
Formation of High-Adhesive and Pure Pt Layers on TiO₂

Makoto SHIRAI, Minoru OHTA, Ichiharu KONDO, Akira KINBARA

1994Volume 37Issue 3 Pages 340-343
Published: March 20, 1994
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.37.340

JOURNAL FREE ACCESS

Download PDF (501K)
Running Test for Ultra High Density ITO Target

Toshio YOKOKAWA, Satoko TANAKA, Koichiro ESHIMA, Ryuichi AMOH, Shuji Y ...

1994Volume 37Issue 3 Pages 344-347
Published: March 20, 1994
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.37.344

JOURNAL FREE ACCESS

Download PDF (589K)
The Product of the Oxygen Exited Beam by RF Type Multi-Capillary ion Source

Akio OKAMOTO, Souichi OGAWA, Tsutomu UENO, Shigeo FUKUI

1994Volume 37Issue 3 Pages 348-350
Published: March 20, 1994
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.37.348

JOURNAL FREE ACCESS

Download PDF (309K)
Charge State Fractions of Silver and Zinc Ions Generated from a Impulse Vaccum Arc

Koichi TSURUTA, Naoto YAMAZAKI, Gin-ichi WATANABE

1994Volume 37Issue 3 Pages 351-354
Published: March 20, 1994
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.37.351

JOURNAL FREE ACCESS

Download PDF (386K)
Simulation of Erosion Rate Distribution on a Target used in a Magnetron Sputtering System

Tsukasa KOBAYASHI, Naokichi HOSOKAWA, Katsunori ITAGAKI, Tomoo UCHIYAM ...

1994Volume 37Issue 3 Pages 355-358
Published: March 20, 1994
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.37.355

JOURNAL FREE ACCESS

Download PDF (450K)
Hydrogen Retention of B₄C Converted Graphite and Isotropic Graphite

Yuji YAMAUCHI, Yuko HIROHATA, Ichiro FUJITA, Tomoaki HINO, Toshiro YAM ...

1994Volume 37Issue 3 Pages 359-362
Published: March 20, 1994
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.37.359

JOURNAL FREE ACCESS

Download PDF (434K)
Helium Retention of Nickel

Hideto YANAGIHARA, Ichiro FUJITA, Tomoaki HINO, Toshiro YAMASHINA

1994Volume 37Issue 3 Pages 363-366
Published: March 20, 1994
Released on J-STAGE: September 29, 2009

DOIhttps://doi.org/10.3131/jvsj.37.363

JOURNAL FREE ACCESS

Download PDF (405K)

Register with J-STAGE for free!