The current-voltage characteristics of a PtSi/p-Si Schottky barrier diode was measured at the temperature of 85K and from the forward bias region of the I-V curve, the electrical parameters of the diode were measured by three methods. The results obtained from the two methods which considered the series resistance were in close agreement with each other and from them barrier height (Φb
), ideality factor (n) and series resistance (Rs
) were found to be 0.2045eV
, 2.877 and 14.556KΩrespectively. By measuring the I-V characteristics in the temperature range of 85-136K the electrical parameters were observed to have strong dependency on temperature. The increase of barrier height and decrease of ideality factor with increasing temperature is attributed to the existence of barrier height inhomogeneities in the silicide-semiconductor structure.
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