Ta
2O
5 thin films have recently been applied in integrated optical devices and as antire-flection coatings on solar cells. These applications are essentially based on the high chemical stability of the film and especially on its optical properties such as a very low propagation loss for light. But all these films are amorphous. In this work, we deposited Ta
2O
5 on a quartz substrate by the reactive DC diode sputtering of a tantalum target in a mixture of argon plus oxygen for the purpose of getting a crystallizedfilm. It was proved through the study that oriented Ta
2O
5 thin films and amorphous Ta
2O
5 thin films are easily deposited independently according to the sputtering conditions. We report here the first observation of piezoelectric phenomena in oriented Ta
2O
5 thin films. We have succeeded in exciting surface acoustic waves on the Ta
2O
5 thin film by the inter-digital transducer.
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